Group symposia

Advanced surface engineering

Hard coatings: synthesis, structure, and properties
Nanocomposite, multilayer, functionally gradient, and self-assembled coatings
Wear mechanisms and tribochemistry of protective coatings
Nanomechanical and nanotribology measurements of hard coatings
Coatings with enhanced thermal stability
Environment-friendly coatings for corrosion protection

Applied surface science

Standards in surface analysis
Chemometrics in data analysis
Physical and chemical characterization of high K materials
Functional molecular surfaces - structural and compositional analysis of organic and biological layers
Fuel cell / battery structural and catalytic materials characterization
SIMS I - general topics
Frontiers in nanomaterials analysis, chemical and structural analysis of nanoparticles
Quantification and interpretation of image based analyses
SIMS II - biological and organic
Applications byclassic and cluster ion techniques
Electron spectroscopies
Approaches for non-destructive thin film analysis
FIB for materials characterization, device creation and sample preparation
Aspects of applied surface science poster session

Biomaterials

Protein-surface interactions
Cell-surface interactions
Protein and cell patterning to engineer function
Biomembranes on a chip
BioMEMS and microfluidics
Biomolecular design and evolution
The nano-bio interface
Biosensors and diagnostics
Surface modification of biomaterials
Biological surface and interface science

Electronic materials and devices

Defects and interfaces in electronic materials and devices
Multifunctional electronic materials
Diamond electronics
Materials for interconnects and contacts to semiconductors

High-k dielectrics

Electronic properties of high-k dielectrics and their interfaces
High-k dielectric growth and processing

Magnetic interfaces and nanostructures

Advanced magnetic data storage
Magnetic thin film processing, high anisotropy and ultrasoft films
Magnetization dynamics and spin momentum transfer
Spin injection and spintronic devices
Magnetic nanostructures and self assembly
Molecular magnetics
Magnetic oxides and half metallics
Exchange coupling, surfaces, interfaces, and spectroscopy
Biomagnetism

MEMS and NEMS

Processing and characterization of materials for MEMS and NEMS
Micro and nano fabrication techniques for scientific research
MEMS and NEMS - eEnabling tools forsScientific research
Materials and processes for bio-MEMS and bio-NEMS
Plasmas in MEMS and NEMS

Manufacturing science and technology

Process control & sensors
Metrology for advanced manufacturing
Semiconductor manufacturing technologies for the 45nm crisis
Nano/MEMS manufacturing

Nanometer-scale science and technology (NS)

Nanoscale imaging techniques
Nanoscale tribology
High-resolution magnetic imaging
Nanowires
Nanowire processing and devices
Nanoscale structures in biological applications
Nanometer-scale structures
Nanotube-based devices
Nanotube processing and composite materials
Nanoscale lithography techniques
Nanoscale patterning
Nanoscale materials processing

Organic films and devices

Molecular and organic films and devices electronics
Molecular andorganic films and devices - optoelectronic
Contacts to molecules and molecular films molecular electronics

Plasma science

Conductor etch
Dielectric etch
Plasma-surface interactions
Low K dielectric etch
High K and difficult materials etch
Plasma diagnostics and sources
Challenges for 45nm node & beyond with panel
High K PECVD
Plasma polymers
Plasmas in bioscience
Plasmas in microfluidics
Nanoscale plasma applications
Atmospheric and micro discharges
Emerging plasma applications

Semiconductors

Narrow gap semiconductors
Compound semiconductor growth and processing
Heteroepitaxy
Low dimensional structures
Ferromagnetic and dilute magnetic semiconductors

Surface science

Gas-surface reaction dynamics
Surface reactions and catalysis
Structure and reactivity of metal clusters
Structure and reactivity of metal clusters
Molecular adsorption/desorption
Tailoring surface properties through spatial and/or chemical modification
Self-assembled monolayers
Ion and cluster deposition
Surface diffusion and transport
Energy transfer and dissipation at surfaces
Surface and interface structure
Electronic structure and excitations
Nucleation and growth
Alloy surfaces
Oxide surfaces and interfaces
Reactions and functionalization of semiconductor surfaces
Surface etching reaction mechanisms and dynamics
Fundamental surface science of compound semiconductor growth and passivation
Tribology, adhesion, and friction
Water-surface interactions
Electrochemistry and fluid-solid interfaces

Technology for sustainability

Science and technology relevant to global sustainability concerns
Development of sustainable technology and practices in industry
Social, political, legal, and economic issues related to the implementation of new technology correctives for sustainability
Sustainability of fuel cells and other renewable energy sources featuring special surface-chemistry properties
Hydrogen storage and transport

Thin films

ALD and applications
Thin films on flexible and polymer substrates
Transparent conducting oxides
Optical thin films
Modeling & fundamentals in thin film deposition
In-situ/ex-situ & real-time monitoring
Mechanical properties of thin films
Photovoltaic thin films
Focused beam processing & fabrication
Thin films and processing for BEOL technology
Device-level thermal/mechanical modeling & measurement

Vacuum technology

Space, the final frontier
Miniaturized vacuum components - sensors, transducers, pumps, hardware
Contamination control and measurement
- a. particulate;
- b. chemical
- c. addressing: new systems, rebuilt systems, preventative and routine maintenance, removal of deposition and etch products, use of chemical and mechanical cleaning materials, measuring surface cleanliness
Outgassing and large vacuum systems
Vacuum measurement, sensors and control
Unique applications of vacuum technology - industrial, medical, etc.