aip.org:history/ead/20080202.xml Finding Aid to the American Vacuum Society Records, 1953-2007 AR.1998.421 Finding aid prepared by American Institute of Physics. Niels Bohr Library and Archives. Niels Bohr Library and Archives
1 Physics Ellipse College Park, Maryland, 20740-3843 301-209-3177 nbl@aip.org
May 19, 2008

Machine-readable finding aid created using Archivists' Toolkit by Mark A. Matienzo in 2008. Any revisions made to this finding aid occurred as part of the editing and encoding process.

 This finding aid was produced using the Archivists' Toolkit 2008-05-22T18:53-0400 Finding aid written in English. Describing Archives: A Content Standard American Vacuum Society records AR.1998.421 Niels Bohr Library and Archives 18.0 Linear feet 16 records boxes, 1 oversize box, and 1 oversize folder 1953-2007 English. This collection contains the records of the American Vacuum Society and its predecessor organization, the Committee on Vacuum Techniques, as well as records of committees, topical divisions, and regional chapters. American Vacuum Society. Scope and Contents of Collection

This collection contains administrative records, minutes, correspondence and subject files, rosters for membership and attendance, publications (including bibliographies, newsletters, membership directories and brochures), reports, and material related to symposia and short courses. It constitutes the archives of the American Vacuum Society, which are maintained before their transfer by the AVS Archivist, an ex-officio member of the AVS History Committee. In additon, the records contain administrative and business records received from the AVS National Office.

The records contain important historical material and provide a complete set of board minutes from the initial meeting of the Committee on Vacuum Techniques onwards. Other notable historical records include materials on the creation of the Journal of Vacuum Science and Technology, the incorporation of AVS, correspondence with other national and international vacuum technology societies, and a set of membership cards that served as the official membership record from the mid 1960s to the 1980s.

The collection also has a wide breadth of records from the Society's committees, topical divisions, and regional chapters. It should be noted that there are often large gaps in these records, often resulting from rotating leadership of these groups and geographic and institutional dispersal of their membership.

 History of the American Vacuum Society

This text was adapted from the AVS History page on the American Vacuum Society's website. An exhaustive history of the Society can be found in the e-book 50 Years of the AVS (1953-2003), available from the Society's website at http://www2.avs.org/historybook/default.asp.

On June 18, 1953, fifty-six people from diverse technical backgrounds, gathered in New York City to consider the need for a forum to discuss problems and applications of high vacuum technology. Six days later, the Committee on Vacuum Techniques was formally organized with the mandate to initiate a symposium and develop programs for education and for standards. The first symposium was held June 16-18, 1954 and attracted 295 registrants from several countries.

Until 1961, the Society was essentially comprised of the people attending the annual symposium, whose votes elected the officers and committee chairs for the succeeding year. At the 1957 Symposium, the membership changed the name of the group to the American Vacuum Society, Inc. A revised Constitution and By-Laws was adopted in 1961, establishing the current procedure of a mail ballot for the election of officers and directors.

The Society was originally organized in the northeast and remained largely in the East and Midwest for several years. As the membership expanded throughout the country, the need for regional groups increased. The first such group was developed by members in the Seattle area, which became the Pacific Northwest Section of the AVS in 1962. Other groups soon followed and there are now 19 regional Chapters throughout the country.

The Society became an affiliate member of the American Institute of Physics (AIP) in 1963 and was elected a full member in 1976. In 1967, the AVS office moved from Boston to the AIP building in New York, and a full-time Executive Secretary was hired for the Society from 1968 until 1989. In 1992, a Technical Director was hired to lead the AVS into new and important technical areas, and in 1993, an Office Manager was brought on board to run the New York Office. In that same year, the AVS moved from its location on 45th Street in New York City in the AIP building (the AIP was relocating to College Park, Maryland) to its current location in the Association Center for non-profit associations at 120 Wall Street. At the present time, the Society has seven employees at the AVS Headquarters on Wall Street and two at the Editorial Office of the Journal of Vacuum Science and Technology in North Carolina. Membership of the Society was about 6,000 in 1995.

Early publications of the Society were transactions of the annual symposia from 1954 to 1963. The first volume of the Journal of Vacuum Science and Technology appeared in 1965. In 1983 the Journal was split into two sections: A -- devoted to Vacuum, Surfaces and Films, and B -- devoted to Microelectronics, Processing and Phenomena. In January 1991, the scope of section B was expanded to include nanometer-scale science and technology with a subtitle change to Microelectronics and Nanometer Structures --Processing, Measurement and Phenomena. In 1985, a new publication format, devoted primarily to the publication of topical conferences, was introduced to permit separate and timely publication of each conference in archival format at an acceptable cost. These are published by AIP as the AVS Conference Series. Surface Science Spectra, an archival journal for the publication of spectra databases from surface analysis techniques was first published in 1992. Biointerphases launched in 2006 as an open access journal for the biomaterials interface community providing an interdisciplinary platform for scientific exchange among the biology, chemistry, physics and materials sciences communities.

To respond to specific interests within the membership, divisional organizations were developed. The first of these, Vacuum Metallurgy, was formed in 1961, which became Advanced Surface Engineering in 1999 when an existing organization affiliated with the Society. The remaining Divisions developed largely from within the Society; listed in order of formation, they are: Thin Films (1964); Surface Science (1968); Vacuum Technology (1970); Electronic Materials and Processing (1979); Fusion Technology (1980), which became Plasma Science and Technology in 1986; Applied Surface Science (1985); Nanometer-Scale Science and Technology (1992); Magnetic Interfaces and Nanostructures (1999); Biomaterial Interfaces (2003). Technical Groups, which focus on newly emerging, dynamic growth areas of science and technology, were established in 1994, and include Manufacturing Science and Technology (MSTG) (1994), The Science of MicroElectroMechanical Systems (MEMS) (1999), and Technology for Sustainability Technical Group (TSTG) (2003).

 Organization and Arrangement of Collection

The collection is organized into six subgroups: Subgroup 1: Board of Directors records Subgroup 2: Publications Subgroup 3: Committee records Subgroup 4: Division and Technical Group records Subgroup 5: Chapter and Region records Subgroup 6: National Office records

This collection was formed by combining several accessions from the American Vacuum Society. These accessions were arranged thematically by a member of the American Vacuum Society prior to their transfer to the Niels Bohr Library and Archives. After reviewing the organization of the records as received, the processing archivist made the decision not to treat it as the original order of the records. The current arrangement reflects the organizational structure of the American Vacuum Society.

The bulk of the collection is arranged chronologically, with a few exceptions arranged alphabetically. Notable examples of these exceptions include the Committee records (Subgroup 3), the Division and Technical Group records (Subgroup 4), and the Chapter and Region records (Subgroup 5). Within each of these subgroups, records are arranged alphabetically by the name of the subordinate body.

 Processing Information

This collection was formed through the combination of several individual accessions. The processing of the combined collection was completed by Mark A. Matienzo in May 2008.

 Information on Accrual of Records

Further accruals are expected.

 Provenance and Acquisition Information

Transferred to the Niels Bohr Library and Archives by the American Vacuum Society in several accessions: 1998 (AR 421), 1999 (AR 13), 2000 (AR 64), 2001 (AR 486), 2002 (AR 540), 2007 (AR 760), 2008 (AR 816), and through accrual (AR 334).

 Preferred Citation of Collection

Cite as: Item and date, Box [number], Folder [number], American Vacuum Society records, 1953-2007, Niels Bohr Library and Archives, American Institute of Physics, College Park, MD.

 Access to Collection

Permission of an officer of depositing organization required for access to records less than 25 years old.

 Restrictions on Use of Collection

Use of primary source material in the Niels Bohr Library requires prior approval through an Application for Access, which includes a statement of research purpose and the names and addresses of two scholars as references. Access applications can be obtained by contacting the Library (telephone 301-209-3177; or e-mail nbl@aip.org). The application can also be printed from our website.

 Materials Separated from Collection

A large amount of monographic material was received in various accessions and is now held in the book collection of the Niels Bohr Library. These include materials in the AVS Monograph Series and several books on the history of AVS and vacuum science and technology.

All photographs and negatives in the collection have been separated to the Emilio Segrè Visual Archives Collection.

 Other Related Materials

Niels Bohr Library and Archives:

Monograph materials published by the American Vacuum Society American Institute of Physics. Office of the Director. Records of H. William Koch, 1932-1988. American Institute of Physics. Office of the Director. Records of H. William Koch, 1960-1987. American Institute of Physics. Office of the Director. RRecords of H. William Koch and Kenneth W. Ford, 1966-1992. American Institute of Physics. Office of the Secretary. Records, 1932-1994. American Institute of Physics. Physics Programs. Lewis Slack papers, 1968-1988. American Vacuum Society. AVS video history interviews, 1991-2000. American Vacuum Society. International Symposium (48th: 2001: San Francisco, Calif.) Special session on NBS/NIST Centennial [videorecording] Oral history interview with Charles B. Duke, 2007 January 23. Oral history interview with Jane P. Chang, 2005 November 1. Oral history interview with Jack S. Kilby.

Thomas Jefferson National Accelerator Facility:

American Vacuum Society Historical Book Collection.

University Archives, University of Illinois at Urbana-Champaign:

John A. Thornton papers, 1943-1991.

Duke, Charles B. Society of Photo-optical Instrumentation Engineers. Thornton, J. A., (John Alexander), 1933- Committee on Vacuum Techniques. Hablanian, M. H. American Institute of Physics. American Vacuum Society. Singleton, J. H., (Jack H.) Korean Vacuum Society. American Society for Metals. Lawrence Livermore National Laboratory. Redhead, P. A. American Vacuum Society. National Symposium. Chinese Vacuum Society. Westwood, William D., (William Dickson), 1937- Zehe, Alfred Holloway, Paul H. Beavis, Leonard C. Meyer, Donald E. Whetten, N. Rey International Union for Vacuum Science, Technique and Applications. Denton, Richard A. McCain, Walter Vacuum technology Lecture notes Journal of vacuum science & technology. Newsletters Correspondence Programs Audits Reports Manuals (instructional materials) Election returns Bylaws (administrative records) Minutes Vacuum technology -- History Rosters Personnel records Subgroup 1: Board of Directors records 1953-2006 Minutes 1953-2006 Board minutes 1953-2006 Committee on Vacuum Techniques board minutes 1 1 1953-1954 Committee on Vacuum Techniques and American Vacuum Society board minutes 1 2 1956-1957 American Vacuum Society board minutes 1 3 1958-1959 American Vacuum Society board minutes 1 4 1960-1961 American Vacuum Society board minutes 1 5 1962-1963 American Vacuum Society board minutes 1 6 1964-1965 American Vacuum Society board minutes 1 7 1966 American Vacuum Society board minutes 1 8 1967 American Vacuum Society board minutes 1 9 1968 American Vacuum Society board minutes 1 10 1969 American Vacuum Society board minutes 1 11 1970 American Vacuum Society board minutes 1 12 1971 American Vacuum Society board minutes 1 13 1972 American Vacuum Society board minutes 1 14 1973 American Vacuum Society board minutes 1 15 1974 American Vacuum Society board minutes 1 16 1975 American Vacuum Society board minutes 1 17 1976 American Vacuum Society board minutes 1 18 1977 American Vacuum Society board minutes 1 19 1978 American Vacuum Society board minutes 1 20 1979 American Vacuum Society board minutes 1 21 1980 American Vacuum Society board minutes 1 22 1981 American Vacuum Society board minutes 1 23 1982 American Vacuum Society board minutes 1 24 1983 American Vacuum Society board minutes 1 25 1984 American Vacuum Society board minutes 1 26 1985 American Vacuum Society board minutes 1 27 1986 American Vacuum Society board minutes 1 28 1987 American Vacuum Society board minutes 1 29 1988 American Vacuum Society board minutes 1 30 1989 American Vacuum Society board minutes 1 31 1990 American Vacuum Society board minutes 1 32 1991 American Vacuum Society board minutes 1 33 1992 American Vacuum Society board minutes 1 34 1993 American Vacuum Society board minutes 1 35 1994 American Vacuum Society board minutes 1 36 1995 American Vacuum Society board minutes 1 36 1995 American Vacuum Society board minutes 1 37 1996 American Vacuum Society board minutes 1 38 1997 American Vacuum Society board minutes 1 39 1998 American Vacuum Society board minutes 1 40 1999 American Vacuum Society board minutes 1 41 2000 American Vacuum Society board minutes 1 42 2001 American Vacuum Society board minutes 1 43 2002 American Vacuum Society board minutes 1 44 2003 American Vacuum Society board minutes 1 45 2004 American Vacuum Society board minutes 1 46 2005 American Vacuum Society board minutes 2 1 2006 Annual business meeting minutes 1956-2005 Committee on Vacuum Techniques business meeting minutes 2 2 1956-1957 American Vacuum Society business meeting minutes 2 3 1958-1965 American Vacuum Society business meeting minutes 2 4 1966-1970 American Vacuum Society business meeting minutes 2 5 1971-1976 American Vacuum Society business meeting minutes 2 6 1978-1985 American Vacuum Society business meeting minutes 2 7 1986-1990 American Vacuum Society business meeting minutes 2 8 1991-1995 American Vacuum Society business meeting minutes 2 9 1996-2000 American Vacuum Society business meeting minutes 2 10 2001-2005 Executive session minutes 1981-2006 Executive session minutes 2 11 1981-1987 Executive session minutes 2 12 1988-1989 Executive session minutes 2 13 1990-1991 Executive session minutes 2 14 1992-1993 Executive session minutes 2 15 1994-1995 Executive session minutes 2 16 1996-1997 Executive session minutes 2 17 1998-1999 Executive session minutes 2 18 2000-2006 Rosters 1953-2006 List of Committee on Vacuum Techniques meeting attendees 2 19 1953-1954 Board and committee rosters 2 20 1957-1964 Board and committee rosters 2 21 1965-1969 Board and committee rosters 2 22 1970-1975 Board and committee rosters 2 23 1976-1980 Board and committee rosters 2 24 1981-1985 Board and committee rosters 2 25 1986-1990 Board and committee rosters 2 26 1991-1995 Board and committee rosters 2 27 1996-2000 Board and committee rosters 2 28 2001-2006 Governance documents 1954-2002 and undated Articles of incorporation and name change 2 29 1954 and 1958 Committee on Vacuum Techniques and American Vacuum Society constitution and bylaws 2 30 1958-1968 and undated Constitution and bylaws 2 31 1969-2002 Election records 1955-2006 and undated Election materials 2 32 1955-1964 Election materials 2 33 1966-1970 Election materials 2 34 1971-1975 Election materials 2 35 1976-1980 Election records 2 36 1981-1985 Election materials 2 37 1986-1991 Election materials 2 38 1992-1995 Election materials 2 39 1996-2001 Election materials 2 40 2002-2006 Tables of election results 2 41 undated Correspondence and subject files 1956-2006 Resident agent certificates 2 42 1981-2004 Materials on tax exemption 2 43 1967-1975 Materials on tax exemption 2 44 1984-1989 Board of directors manuals 2 45 2000-2001 Budget procedures 2 46 1972 Society Services Committee report 2 47 1979 Fred Dylla letter on proposed guidelines for non-AVS short courses announcements in AVS newsletters 2 48 1986 Proposal for creation of Executive Director position 2 49 1969-1973 Memoranda of agreement and related materials between AVS and the American Institute of Physics 2 50 1971-1985 Proposal to move AVS from AIP to the American Society of Metals 2 51 1970-1971 Materials on hiring AVS meetings manager 2 52 1981 John Thornton briefing to Board of Directors 2 53 1982 Materials on AIP move from New York to Maryland 2 54 1987 John Singleton (AVS Secretary) correspondence 2 55 1984 Committee on Vacuum Technique memorandum on sponsor membership 2 56 1956 Publicity materials and correspondence 2 57 1962-1964 Correspondence on obituaries 2 58 1998-2003 Clippings and correspondence concerning the arrest of Alfred Zehe at the 1983 AVS symposium 2 59 1983-1984 Correspondence with the Chinese Vacuum Society 2 60 1985-1987 Correspondence with SPIE 2 61 1986 Correspondence and materials on International Organization For Vacuum Science And Technology and International Union for Vacuum Science, Technique and Applications 2 64 1960-2001 Correspondence on travel planning for conferences 2 62 1973-1974 Memorandum of agreement with the Korean Vacuum Society 2 63 1991 Membership 1953-2006 CVT and AVS membership rosters and directories 2 65 1953-1969 AVS membership rosters and directories 2 66 1971-1979 Membership directories 2 68 1993-1995 Membership directories 2 67 1981-1989 Membership directories 2 69 1997 Membership brochures 2 70 1971-2006 and undated Membership cards circa 1965-1990 A 2 71 B 3 1-2 C 3 3 D 3 4 E-F 3 5 G 3 6 H 3 7-8 I-J 3 9 K 3 10 L 3 11 M 3 12-13 N-O 3 14 P-Q 3 15 R 4 1 S 4 2-3 T-V 4 4 W 4 5 V-Z 4 6 CD-ROM of membership files from Slack, Inc. 16 54 2003 Scope and Contents

Contains two CSV text files with membership data.

 Subgroup 2: Publications 1960-2006 Newsletters 4 7 1960-1977 Newsletters 4 8 1978-1982 Newsletters 4 9 1983-1986 Newsletters 4 10 1987-1988 Newsletters 4 11 1989-1990 Newsletters 4 12 1991-1992 Newsletters 4 13 1993-1994 Newsletters 4 14 1995-1996 Newsletters 4 15 1997-1999 Newsletters 4 16 2000-2002 Newsletters 4 17 2003-2005 Newsletters 4 18 2006 CD-ROM of electronic copies of newsletters 16 54 1961-1989 Marketing Programs brochures 4 19 2001-2006 Buyers' Guide brochures 4 20 undated Prospectus 4 21 2006 Subgroup 3: Committee records Committee liaison lists 5 1 2002-2006 Awards Committee records 1985-2006 Calls for nominations 5 47 1991-2006 Awards reception brochures 5 48 1985-2006 Correspondence on initial funding of John Vossen Memorial Grant Awards 5 49 1996-1998 Nomination packages 5 50 1996-1997 Nomination packages 5 51 1998 Nomination packages 5 52 1999 Nomination packages 6 1 2000 Nomination packages 6 2 2001 Nomination packages 6 3 2002 Nomination packages 6 4 2003 Nomination packages 6 5 2004 Nomination packages 6 6 2005 Nomination packages 6 7 2007 Chapters, Groups and Divisions Committee records 1969-1988 Policy manuals 5 29 1982-1988 Newsletters 5 30 1984-1988 Correspondence on reorganization of sections into chapters and regional administration groups 5 31 1969-1970 Chapter and division membership information 5 32 1969-1979 Distinguished Lecturer Committee brochures 6 8 1999-2004 Education Committee records 1967-2006 Correspondence on creation of AVS calendar 5 33 1973 Calendar and related production materials 5 34 1991-1992 Materials on AVS film and video 5 35 1967-1997 and undated Science Educators Workshop release forms 5 36 1991-1995 Science Educators Workshop release forms 5 37 1996-2000 Science Educators Workshop release forms 5 38 2001-2006 Permission forms for reproducing graphics in Robert Waits' Thin Film Deposition and Patterning 5 39 1994-1998 Correspondence 5 40 1967-1980 Reports 5 41 1975-1993 Bibliographies 5 42 1974-1987 Monograph drafts 5 43 1987 Roster 5 44 2000 Publication pricelists 5 45 1967-2006 Contract with Lawrence Livermore National Laboratory on videotaping short courses 5 46 1981 Exhibitors and Manufacturers Committee newsletters 6 9 1999-2006 Future Symposium Sites Committee correspondence on 1974 Vacuum Show in Anaheim, California 10 9 1969-1970 History Committee records 1960-2005 Minutes 5 26 1987-2005 Correspondence on AVS history 5 27 2002 and undated Correspondence and materials on the 1996 Thin Film History exhibit 5 28 1960-1997 Thin Film History exhibit materials 17 circa 1996 CD-ROMs of AVS history monograph and drafts 16 54 circa 2003 Local Arrangements Committee records 1961-2004 Minutes 10 10 1961 Records on 1968 Symposium 10 11 circa 1968 Reports 10 12 1968-1988 Manuals 10 13 2002-2004 Publications Committee records 1962-2006 Materials on the creation of the Journal of Vacuum Science and Technology (JVST) 5 2 1962-2006 JVST tables of contents 5 3 1965-1966 Correspondence on amalgamating JVST and Vacuum 5 4 1969-1970 Correspondence on donating copies of JVST to India 5 5 1972-1975 Correspondence on complementary symposium registration 5 6 1976 and 1986 Correspondence on chapter and division dues 5 7 1972 and 1986 Liability disclaimer opinion for use in AVS publications 5 8 1975 Publications pricelist 5 9 circa 1975 Correspondence on availability of United States Air Force appropriations to pay publication fees 5 10 1978 Reports 5 11 1970-1977 Reports 5 12 1985-1989 Calls for papers for Biointerfaces 5 13 undated Correspondence to AVS members about JVST Online 5 14 1997 Copies of JVST on CD-ROM 16 54 1993-2001 Short Course Executive Committee records 1965-2006 Minutes 6 10 1999-2006 Some reflections on my time with the AVS (Len Beavis) 6 11 undated Beavis, Leonard C. National Short Course Program report 6 12 1997 Correspondence 6 13 1984-1985 Policies 6 14 1979-1985 Report 6 15 1984 Market research proposal 6 16 1991 Marketing study 6 17 1999 Agreement for online courses with SemiZone 6 18 2002 Completion certificates 6 19 1974-2006 Programs and brochures 6 20 1968-1985 Programs and brochures 6 21 1998 Programs and brochures 6 22 1999 Programs and brochures 6 23 2000 Programs and brochures 6 24 2001 Programs and brochures 6 25 2002 Programs and brochures 6 26 2003 Programs and brochures 6 27 2004 Programs and brochures 6 28 2005 Programs and brochures 6 29 2006 Short course notes 1965-1997 Vacuum Technology for Technicians (Yeager) 6 30 1965 Basic Vacuum 6 31 1970 Vacuum Processes 6 32 1971 Vacuum System Technology 6 33 1971 Vacuum Technology 6 34 1971 Atomic Composition I (Musket) 6 35 1972 Evaporation Techniques (Bunshah) 6 36 1972 Fundamentals of Sputtering Technology (Mattox) 6 37 1972 Partial Pressure Analyzers and Analysis (Beavis) 6 38 1972 Fundamentals of Sputtering Technology (Mattox) 6 39 1974 Microcircuit Thin Film Technology (Waits, Skok, and Wilson) 6 40 1974 Vacuum Technology 6 41-42 1974 Optical Coating Technology (Baumeister) 6 43 1975 Vacuum System Design (Patton) 6 44 1975 Freeze Drying (Patton) 6 45 1976 Techniques and Applications of Thin Films for Semiconductor Devices (Wilson) 6 46 1976 Coating Deposition by Sputtering (Thornton) 6 47 1979 Ion Beam Applications to Thin Films (Cuomo, Kaufman and Harper) 6 48 1979 Sputtering (Westwood) 6 49 1979 Sputter Deposition and Ion Beam Processes (Thornton) 7 1 1980 Sputter-Ion and Titanium Sublimation Pumping (Welch) 7 2 1981 System Design (Patton) 7 3 1981 Systems Design Concepts (Patton) 7 4 1984 Pressure Measurements (Beavis) 7 5 1984 Systems Design Concepts (Patton) 7 6 1986 Vacuum Leak Detection (Patton) 7 7-8 1986 Vacuum Technology Fundamentals (Patton) 7 9 1986 Vacuum Technology Fundamentals exercises 7 10 1986 Structure-Property Relations in Thin Films (Vook) 7 11 1991 Sputter Deposition (Westwood) 7 12 1996 Operation and Maintenance of Vacuum Pumping Systems (Holloway) 7 13 1997 March Sputter Deposition (Westwood) 7 14 1997 March Statistical Process Control in the Modern Wafer Fab (Waits, Yarling) 7 15 1997 March Basics of Radio Frequency Technology (West) 7 16 1997 March Chemical Mechanical Planarization (Givens) 7 17 1997 March Chemical Vapor deposition for Microelectronics (Rogers) 7 18 1997 March Controlling Contamination in Vacuum Systems (Patton) 7 19 1997 March Diagnostics for Plasma Techniques (Ghanbari) 7 20 1997 March High Density Plasma Processing of Electronic Materials (Oehrlein) 7 21 1997 March Introduction to Contamination Control in Semiconductor Manufacturing Equipment (Johnson) 7 22 1997 March Magnetic Force Microscopy (Babcock) 7 23 1997 March Magnetic Thin Films (Marinero, Gurney) 7 24 1997 March Plasma Etching and RIE (Coburn) 7 25 1997 March Sputter Deposition (Westwood) 8 1 1997 March Basics of Radio Frequency Technology (West) 8 2 1997 May Introduction to Contamination Control in Semiconductor Manufacturing Equipment (Johnson) 8 3 1997 May Overview of Applied Vacuum technology (Benapfl) 8 4 1997 May Plasma Etching and RIE (Coburn) 8 5 1997 May Surface Preparation for Thin Film Deposition (McGuire) 8 6 1997 May Basics of Radio Frequency Technology (Barber) 8 7 1997 June Chemical Vapor deposition for Microelectronics (Rogers) 8 8 1997 June Fundamentals of Vacuum Technology (Patton, Singleton) 8 9 1997 June High Density Processing of Electronic Materials (Oehrlein) 8 10 1997 June Mass Flow Controllers (Hinkle) 8 11 1997 June Materials and Surface Characterization and Analysis (Brundle) 8 12 1997 June Operation and Maintenance of Vacuum Pumping Systems (Singleton) 8 13 1997 June Plasma Enhanced Chemical Vapor Deposition (Jansen) 8 14 1997 June Plasma Etching and RIE (Coburn) 8 15 1997 June Surface Preparation for Thin Film Deposition (McGuire) 8 16 1997 June Throughput Pump Technology (Hablanian) 8 17 1997 June Vacuum Leak Detection (Schubert) 8 18 1997 June Vacuum System Design (Patton) 8 19 1997 June Application of Residual Gas Analysis in Semiconductor Processes (Waits) 8 20 1997 October Auger Electron Spectroscopy (Grant) 8 21 1997 October Basics of Radio Frequency Technology (West) 8 22 1997 October Chemical/Mechanical Planarization for Microelectronics manufacturing (Givens) 8 23 1997 October Chemical Vapor Deposition for Microelectronics (Rogers) 8 24 1997 October Controlling Contamination in Vacuum Systems (Patton) 8 25 1997 October Depth Profiling (Grant) 9 1 1997 October Diagnostics for Plasma Technologies (Ghanbari) 9 2 1997 October Ellipsometry (Tompkins) 9 3 1997 October Fundamentals of Semiconductor Characterization (Ahrenkiel) 9 4 1997 October Fundamentals of Surface Science (Czanderna) 9 5 1997 October Fundamentals of Vacuum Technology, (Outlaw, Singleton and Tompkins) 9 6 1997 October Gas Flow in Vacuum Systems (Boeckmann) 9 7 1997 October Growth and Characterization of Magnetic Thin Films for the Storage Industry (Marinero, Gurney) 9 8 1997 October Hard Coatings by PVD Methods (Sproul, Matthews) 9 9 1997 October IC Microdevice Fabrication (Hoff, Gilbert) 9 10 1997 October Introduction to Ion Sources (Ghanbari) 9 11 1997 October Mass Flow Controllers (Hinkle) 9 12 1997 October Materials and Surface Micro-Characterization and Analysis (Brundle) 9 13 1997 October Nucleation, Growth and Microstructure Evolution (Greene) 9 14 1997 October Operation and Maintenance of Vacuum Pumping Systems (Singleton) 9 15 1997 October Optical Diagnostics for Plasma Processing (Selwyn) 9 16 1997 October Partial Pressure Analyzers (Schubert) 9 17 1997 October Plasma Enhanced CVD (Jansen) 9 18 1997 October Plasma Equipment Modelling and Simulation (Graves) 9 19 1997 October Plasma Etching and RIE: Fundamentals (Coburn) 9 20 1997 October Plasma Etching and RIE: CMOS Applications (Gabriel) 9 21 1997 October Rapid Thermal Processing (Yarling) 9 22 1997 October Secondary Ion Mass Spectroscopy (SIMS) (Stevie) 9 23 1997 October Sputter Deposition (Westwood) 9 24 1997 October Surface Preparation for Thin Film Deposition (McGuire) 9 25 1997 October Technological Aspects of Metal/Semiconductor Contacts (Coutts) 9 26 1997 October Thin Film Deposition and Patterning Techniques (Waits) 10 1 1997 October Total pressure Gauging Techniques (Peacock) 10 2 1997 October Transparent Conducting Oxides (Coutts) 10 3 1997 October Understanding Optical Coatings (Carniglia) 10 4 1997 October Vacuum Leak Detection (Benapfl) 10 5 1997 October Vacuum Sealing and Joining Techniques (Peacock) 10 6 1997 October Vacuum System Design (Patton) 10 7 1997 October X-ray Photoelectron Spectroscopy (Grant) 10 8 1997 October Sputter Deposition (Westwood) 10 8A undated Standards Committee and Recommended Practices Committee records 1985-2006 Administrative History

The Standards Committee was first convened early in the history of the American Vacuum Society. In February 1985, John Sullivan made a proposal during a Board of Directors meeting to change the committee's name to the Recommended Practices Committee. The change of name required a change to the AVS constitution, which was subsequently approved by AVS membership later that year.

 Standards Committee rosters 5 15 1969-1979 Standards Committee reports 5 16 1960-1978 Standards Committee reports 5 17 1986-1988 Materials on standards creation 5 18 1963-1967 Standards lists and order forms 5 19 1967-1976 Correspondence on vacuum-related International Standards Organization standards 5 20 1974-1975 Correspondence on distribution of Education Committee monographs and AVS standards 5 21 1977 Glossary of Terms Used In Vacuum Technology 5 22 1958 Standards of the American Vacuum Society 5 23 1975 AVS Recommended Practices On Vacuum Measurements and Techniques, Volume 1 5 24 undated Recommended Practices Committee minutes 5 25 2004-2006 Symposia Programs Committee records 1954-2006 Reports 10 14 1971-1990 Summary documents for 1980 Symposium 10 15 1978-1980 Symposium registration statistics 10 16 1954-2002 Publications concerning AVS National Symposia 1954-2006 Scope and Contents note

Includes programs, brochures and other promotional material, published volumes of abstracts, and calls for papers.

 CVT symposium programs and brochures 10 17 1954-1957 Symposium program and brochures 10 18 1958 Symposium program and brochures 10 19 1959 Symposium program and brochures 10 20 1960 Symposium program and brochures 10 21 1961 Symposium program and brochures 10 22 1962 Symposium program and brochures 10 23 1963 Symposium program and brochures 10 24 1964 Symposium program and brochures 10 25 1965 Symposium abstracts 10 26 1966 Symposium abstracts 10 27 1967 Symposium program and brochures 10 28 1968 Symposium program and brochures 10 29 1969 Symposium program and brochures 10 30 1970 Symposium program and brochures 10 31 1971 Symposium program and brochures 10 32 1972 Symposium program and brochures 10 33 1973 Symposium program and brochures 10 34 1974 Symposium program and brochures 10 35 1975 Symposium program and brochures 10 36 1976 Symposium program and brochures 10 37 1977 Symposium program and brochures 10 38 1978 Symposium program and brochures 10 39 1979 Symposium program and brochures 11 1 1980 Symposium program and brochures 11 2 1981 Symposium program and brochures 11 3 1982 Symposium program and brochures 11 4 1984 Symposium program and brochures 11 5 1984 Symposium program and brochures 11 6 1985 Symposium program and brochures 11 7 1986 Symposium program and brochures 11 8 1987 Symposium program and brochures 11 9 1988 Symposium program and brochures 11 10 1989 Symposium program and brochures 11 11 1990 Symposium program and brochures 11 12 1991 Symposium program and brochures 11 13 1992 Symposium program and brochures 11 14 1993 Symposium program and brochures 11 15 1994 Symposium program and brochures 11 16 1995 Symposium program and brochures 12 1 1996 Symposium program and brochures 12 2 1997 Symposium program and brochures 12 3 1998 Symposium program and brochures 12 4 1999 Symposium program and brochures 12 5 2000 Symposium program and brochures 12 6 2001 Symposium program and brochures 12 8 2003 Symposium program and brochures 12 9 2004 Symposium program and brochures 12 10 2005 Symposium program and brochures 12 11 2006 Publications concerning other AVS symposia 1999-2006 International Conference on Advanced Materials and Processes for Micro Electronics 12 12 1999 International Conference on Microelectronics and Interfaces 12 13 2000-2006 Oversize photographs of AVS symposia 17 1 1961, 1965, and 1971 Topical Conferences Committee records 1980-2006 Handbook for topical conference organizers, 1992 12 14 Correspondence and clippings on US government intervention at the 1980 Bubble Memory Conference 12 15 1980 Topical conference programs and brochures 1987-2006 Applied Surface Analysis 12 16 1989-1999 Characterization of High Tc Superconductors 12 17 1987 Flat Panel Displays 12 18 1999 Mid-Infrared Optoelectronic Materials and Devices 12 19 2002 Physics and Chemistry of Semiconductor Interfaces 2005-2006 12 20 2005-2006 Plasma- and Process-Induced Damage 12 21 2002 Qualitative Surface Analysis 12 22 2001 Silicon-Based Heterostructures 12 23 1990 Ultra-Shallow Junctions 12 24 2001-2003 Understanding and Operating in Threat Environments 12 25 2002 Subgroup 4: Division and Technical Group records 1960-2007 Division and section bylaws 13 1 1969-1979 Applied Surface Science Division records 1986-2007 History and bylaws 13 2 1985-2005 Election materials 13 3 1986-2007 Rosters 13 4 1985-2006 Executive Committee agendas and minutes 13 6 1985-2005 Business Meeting agendas and minutes 13 5 1986-2005 Surface Analysis conference materials 13 7 2002-2005 Newsletters 13 8 1987-1988 Biomaterial Interfaces Division records 13 9 2002-2006 Electrochemistry and Fluid/Solid Interfaces Technical Group bylaws 13 10 1995 Electronic Materials and Processing Division records 1980-2006 Bylaws 13 11 1979-2002 Rosters 13 12 1978-2003 Election materials 13 13 1980-2006 Minutes 13 14 1978-2005 Newsletters 13 15 1980-1989 Fusion Technology Division and Plasma Science and Technology Division records 1980-2006 Administrative History

The Fusion Technology Division began in 1980 under the leadership of Manfred Kaminsky, and, spurred by a proposal by Fred Dylla, it evolved into the Plasma Science and Technology Division in 1986 in order to emphasize its key role in microelectronics processing.

 Fusion Technology Division founding petition and announcement 13 16 1980 Fusion Technology Division bylaws 13 17 1980 Plasma Science and Technology Division bylaws 13 18 1986-1987 Fusion Technology Division rosters 13 19 1981-1982 Fusion Technology Division newsletters 13 20 1980-1986 Plasma Science and Technology Division newsletters 13 21 1987-1989 Plasma Science and Technology Division minutes 13 22 1996-2005 Fusion Technology Division election materials 13 23 1981-1986 Plasma Science and Technology Division election materials 13 24 1987-2006 Plasma Science and Technology Division award information 13 25 1988-1996 Magnetic Interfaces and Nanostructures Division election materials 13 26 2001-2006 Manufacturing Science and Technology Group bylaws 13 27 undated Nanometer-Scale Science and Technology Division records 13 28 1999-2006 Surface Science Division records 1968-2006 Founding documents 13 29 1968 Bylaws 13 30 1968-2002 Rosters 13 31 1968-1979 Election materials 13 32 1972-2006 Newsletters 13 33 1979-1987 Student award materials 13 34 1982 Thin Film Division records 1964-2006 Bylaws 13 35 1964-1971 Rosters 13 36 1968-1989 and undated Election materials 13 37 1968-2006 Newsletters 13 38 1963-1979 Minutes 13 39 1999-2000 Student Travel Awards materials 13 40 1986-1987 Conference materials 13 41 1962-1987 Publications 1974-1983 Bibliography on metallization materials and techniques for silicon devices, volumes I-XI (Vossen, et al.) 13 42 1974-1983 Surface cleaning in thin film technology (Mattox) 13 43 1975 Pumping hazardous gases (Fraser, et al.) 13 44 1980 Vacuum Metallurgy Division and Advanced Surface Engineering Division records 1960-2007 Biographical/Historical note

The Vacuum Metallurgy Division (VMD) was the first division created in the Society. As surface engineering became more and more important to the International Conference On Metallurgical Coatings And Thin Films and as the interest in vacuum melting decreased, it was recognized that the name of the Division did not reflect its main activities. Surface engineering was its main thrust, and Bill Sproul lead an effort to change the name of the division. In 2000, the VMD became the Advanced Surface Engineering Division (ASED).

Vacuum Metallurgy Division founding documents and bylaws 13 45 circa 1960 Vacuum Metallurgy Division rosters 13 46 1965-1988 Vacuum Metallurgy Division election materials 13 47 1965-1999 Advanced Surface Engineering Division election materials 13 48 2000-2006 Vacuum Metallurgy Division executive committee minutes 13 49 1973-1979 Vacuum Metallurgy Division executive committee minutes 13 50 1980-1981 Vacuum Metallurgy Division executive committee minutes 13 51 1982-1983 Vacuum Metallurgy Division executive committee minutes 13 52 1984-1985 Vacuum Metallurgy Division executive committee minutes 13 53 1986-1987 Vacuum Metallurgy Division executive committee minutes 13 54 1988 Vacuum Metallurgy Division executive committee minutes 13 55 1998 Advanced Surface Engineering Division executive committee minutes 13 56 2006 Vacuum Metallurgy Division newsletters 13 57 1962-1973 Vacuum Metallurgy Division correspondence on contracts for publication of proceedings 13 58 1985-1988 Conference materials 1962-2007 International Conference on Metallurgical Coatings materials 13 59 1978-1990 International Conference on Metallurgical Coatings and Thin Films Materials 14 1 1995-2007 International Industrial Seminar on Pilot Plant Experiences materials 14 2 1980-1981 International Vacuum Metallurgy Conference materials 14 3 1967-1988 Ion, Electron, and Laser Beam Technology Symposium 14 4 1970 Stucture-Property Relationships in Thick Film and Bulk Coatings materials 14 5 1974 Vacuum Metallurgy Conference 14 6 1962-1984 Vacuum Technology Division records 1969-2006 Bylaws 14 7 1977-2001 Rosters 14 8 1969-1977 Election materials 14 9 1970-2006 Executive committee minutes 14 10 1970-2006 Newsletters 14 11 1979-1981 Materials on topical conferences 14 12 1986-1989 Donald E. Meyer correspondence on the International Science and Engineering Fair 14 13 1978-1986 Walter McCain correspondence on distribution of AVS monographs 14 14 1977-1978 Subgroup 5: Chapter and Section records Uniform bylaws for chapters and chapter founding information 14 15 1971-1972 Argonne National Laboratory-National Accelerator Laboratory records 14 16 1970-1983 Arizona Chapter records 1979-2006 Bylaws and petition to form 14 17 1979-2006 Rosters 14 18 1981-1986 Newsletters 14 19 1980-1999 Symposium and short course materials 14 20 1980-1986 Symposium and short course materials 14 21 1987-1989 Symposium and short course materials 14 22 1990-1991 Symposium and short course materials 14 23 1994-1998 Symposium and short course materials 14 24 1999-2001 Central Indiana Chapter records 14 25 1971-1982 Delaware Valley Chapter records 1968-1989 and undated Bylaws 14 26 undated Rosters 14 27 1968-1986 Minutes 14 28 1977-1987 Symposium materials 14 29 1968-1989 Florida Chapter records 1971-2006 Petition for formation and bylaws 14 30 1971-1983 Rosters 14 31 1971-1989 Election materials 14 32 1999-2006 Symposium materials 14 33 1972-1989 Symposium materials 14 34 1997-2006 Great Lakes Chapter records 14 35 1971-1972 Greater New York Chapter records 1971-2002 Bylaws 14 36 1971 Rosters 14 37 1969-1989 Symposium materials 14 38 1969-1989 Merger vote for incorporation into the Upstate New York Chapter 14 39 2002 Illinois Chapter records 1984-1989 Election materials 14 40 1984-1989 Newsletters 14 41 1985-1988 Symposium materials 14 42 1985-1987 Michigan Chapter records 14 43 2000-2006 Mid-Atlantic Chapter records 14 44 1963-2006 Midwest Section records 14 45 1968-1969 Minnesota Chapter records 1969-2005 Bylaws and history 14 46 2002 and undated Rosters 14 47 1970-1989 Election results 14 48 2000-2006 Minutes 14 49 1969-2001 Award information 14 50 1978-1990 Newsletters 14 51 2005 and undated Symposium and meeting materials 14 52 1978-2004 New England Chapter records 1968-2006 Policy votes 14 53 1969-1973 Rosters 14 54 1968-1985 Symposium materials 14 55 1968-1989 Symposium materials 14 56 1995-2006 New Mexico Chapter records 1967-2006 Bylaws 14 57 1967-2006 Rosters and election materials 14 58 1968-2006 Contract with Vivienne Harwood Mattox 14 59 1987 Executive committee minutes 14 60 2003 Symposium materials 14 61 1970-2005 Scholarship materials 14 62 1980-2005 North Central Chapter records 14 63 1974-1988 Northern California Chapter records 1968-2006 Bylaws 15 1 1984-2006 Rosters and election materials 15 2 1968-2005 Executive Committee minutes 15 3 1999 Executive Committee minutes 15 4 2000 Executive Committee minutes 15 5 2001 Executive Committee minutes 15 6 2004 Executive Committee minutes 15 7 2006 Contract with Virginia Brunner 15 8 1985 Newsletters 15 9 1981-1999 Directories 15 10 1986-1994 Directories 15 11 2001-2002 Buyers' guide 15 12 2006 Symposium materials 15 13 1968-2006 Education Committee records 15 14 2002-2006 Ohio Chapter records 1980-2006 Bylaws 15 15 1980 and 2006 Rosters 15 16 1981-1988 Newsletters 15 17 1985-1989 Meeting announcements 15 18 1980-1988 Pacific Northwest Chapter records circa 1968-2006 Bylaws 15 19 circa 1968-2006 Rosters and election results 15 20 1968-2006 Minutes 15 21 2002 Symposium materials 15 22 1972-2006 Prairie Chapter records 2001-2006 Bylaws 15 23 2006 Election materials 15 24 2006 Executive Committee minutes 15 25 2001-2005 Meeting information 15 26 2002 Rocky Mountain Chapter records 1969-2006 Bylaws 15 27 2006 Rosters 15 28 1971-1988 Symposium materials 15 29 1969-2006 Southern California Chapter records 1969-2006 Bylaws 15 30 1991-2006 Rosters 15 31 1971-2002 Executive Committee minutes 15 32 1976-1979 Executive Committee minutes 15 33 1980-1983 Executive Committee minutes 15 34 1984-1987 Executive Committee minutes 15 35 1988-1991 Executive Committee minutes 15 36 1992-1995 Executive Committee minutes 15 37 1996-1998 Executive Committee minutes 15 38 2001-2002 Symposium Committee minutes 15 39 1979-1991 Newsletters 15 40 1972-1979 Newsletters 15 41 1980-1984 Newsletters 15 42 1985-1989 Newsletters 15 43 1994-2005 Symposium materials 15 44 1969-1979 Symposium materials 15 45 1980-1984 Symposium materials 15 46 1985-1988 Symposium materials 15 47 1989-1992 Symposium materials 15 48 1994-2005 Obituary of Joseph Renn Davis 15 49 2004 Tennessee Valley Chapter records 1978-2002 Bylaws and founding documents 16 1 1978-2004 Rosters 16 2 1981-1985 Executive committee minutes 16 3 2002 Newsletters 16 4 1981-1989 Symposium materials 16 5 1981-2002 Correspondence on award design 16 6 1983 Texas Chapter records 16 7 1981-1989 Upstate New York Chapter records 1971-2006 Bylaws 16 8 1971-2006 Rosters 16 9 1975-2002 Reports 16 10 1975-1979 Minutes 16 11 2004 Newsletters 16 12 1978-2003 Symposium materials 16 13 1974-1989 Symposium materials 16 14 2000-2004 Western Pennsylvania Chapter records 1969-2006 Bylaws and founding documents 16 15 1969-2006 Executive Committee minutes 16 16 1987-1988 Wisconsin Chapter records 16 17 1972-1985 Student Chapter records 2002-2007 and undated Flyer and procedure manual 16 18 2004 and undated Northwestern University Chapter records 16 19 2003-2007 University of Central Florida Chapter records 16 20 2003-2006 University of Florida Chapter records 16 21 2002-2005 Subgroup 6: National Office records 1961-2006 Organizational charts 16 22 2000-2001 Letterheads 16 23 undated Report on affiliation with American Association for the Advancement of Science 16 24 1962 Trademark registration material 16 25 2000 Materials related to incorporation in New York State 16 26 2001-2006 Policy manuals 1961-2001 Standard Policy Manual 16 27 1961 Standard Policy Manual 16 28 1978 Standard Policy and Procedures Manual 16 29 1991 Standard Policy and Procedures Manual 16 30 2000 AVS.org backup schedule and recovery policy manual 16 31 2001 Financial records 16 40 1964-2005 Annual financial reports 16 32 1964-1970 Annual financial reports 16 33 1971-1977 Annual financial reports 16 34 1978-1983 Annual financial reports 16 35 1984-1988 Annual financial reports 16 36 1989-1992 Annual financial reports 16 37 1993-1996 Annual financial statements 16 38 1999-2001 Annual financial statements 16 39 2002-2005 Grants to AVS 16 40 1971-1989 Contracts 16 40 1999-2006 Membership and subscription contractual agreements with AIP 16 41 1990 Contracts with Slack, Inc. 16 42 1991-1999 Contracts with individuals 16 43 1995-1999 Contracts with Technical Marketing Programs, Inc. 16 44 1998-1999 Contractual agreements on AIP management of the AVS vacuum show 16 45 1990-2002 Website redesign contract materials 16 46 2002 Lease-related materials 16 47 2001-2006 Performance appraisals and staff information 16 48 1987-1994 Performance appraisals 16 49 1995-1996 Performance appraisals 16 50 1998-1999 Performance appraisals 16 51 2000-2001 Performance appraisals 16 52 2002-2003 Performance appraisals 16 53 2004-2006