Finding Aid to the American Vacuum Society Records, 1953-2007 AR.1998.421

Scope and Contents of Collection

This collection contains administrative records, minutes, correspondence and subject files, rosters for membership and attendance, publications (including bibliographies, newsletters, membership directories and brochures), reports, and material related to symposia and short courses. It constitutes the archives of the American Vacuum Society, which are maintained before their transfer by the AVS Archivist, an ex-officio member of the AVS History Committee. In additon, the records contain administrative and business records received from the AVS National Office.

The records contain important historical material and provide a complete set of board minutes from the initial meeting of the Committee on Vacuum Techniques onwards. Other notable historical records include materials on the creation of the Journal of Vacuum Science and Technology, the incorporation of AVS, correspondence with other national and international vacuum technology societies, and a set of membership cards that served as the official membership record from the mid 1960s to the 1980s.

The collection also has a wide breadth of records from the Society's committees, topical divisions, and regional chapters. It should be noted that there are often large gaps in these records, often resulting from rotating leadership of these groups and geographic and institutional dispersal of their membership.

History of the American Vacuum Society

This text was adapted from the AVS History page on the American Vacuum Society's website. An exhaustive history of the Society can be found in the e-book 50 Years of the AVS (1953-2003), available from the Society's website at http://www2.avs.org/historybook/default.asp.

On June 18, 1953, fifty-six people from diverse technical backgrounds, gathered in New York City to consider the need for a forum to discuss problems and applications of high vacuum technology. Six days later, the Committee on Vacuum Techniques was formally organized with the mandate to initiate a symposium and develop programs for education and for standards. The first symposium was held June 16-18, 1954 and attracted 295 registrants from several countries.

Until 1961, the Society was essentially comprised of the people attending the annual symposium, whose votes elected the officers and committee chairs for the succeeding year. At the 1957 Symposium, the membership changed the name of the group to the American Vacuum Society, Inc. A revised Constitution and By-Laws was adopted in 1961, establishing the current procedure of a mail ballot for the election of officers and directors.

The Society was originally organized in the northeast and remained largely in the East and Midwest for several years. As the membership expanded throughout the country, the need for regional groups increased. The first such group was developed by members in the Seattle area, which became the Pacific Northwest Section of the AVS in 1962. Other groups soon followed and there are now 19 regional Chapters throughout the country.

The Society became an affiliate member of the American Institute of Physics (AIP) in 1963 and was elected a full member in 1976. In 1967, the AVS office moved from Boston to the AIP building in New York, and a full-time Executive Secretary was hired for the Society from 1968 until 1989. In 1992, a Technical Director was hired to lead the AVS into new and important technical areas, and in 1993, an Office Manager was brought on board to run the New York Office. In that same year, the AVS moved from its location on 45th Street in New York City in the AIP building (the AIP was relocating to College Park, Maryland) to its current location in the Association Center for non-profit associations at 120 Wall Street. At the present time, the Society has seven employees at the AVS Headquarters on Wall Street and two at the Editorial Office of the Journal of Vacuum Science and Technology in North Carolina. Membership of the Society was about 6,000 in 1995.

Early publications of the Society were transactions of the annual symposia from 1954 to 1963. The first volume of the Journal of Vacuum Science and Technology appeared in 1965. In 1983 the Journal was split into two sections: A -- devoted to Vacuum, Surfaces and Films, and B -- devoted to Microelectronics, Processing and Phenomena. In January 1991, the scope of section B was expanded to include nanometer-scale science and technology with a subtitle change to Microelectronics and Nanometer Structures --Processing, Measurement and Phenomena. In 1985, a new publication format, devoted primarily to the publication of topical conferences, was introduced to permit separate and timely publication of each conference in archival format at an acceptable cost. These are published by AIP as the AVS Conference Series. Surface Science Spectra, an archival journal for the publication of spectra databases from surface analysis techniques was first published in 1992. Biointerphases launched in 2006 as an open access journal for the biomaterials interface community providing an interdisciplinary platform for scientific exchange among the biology, chemistry, physics and materials sciences communities.

To respond to specific interests within the membership, divisional organizations were developed. The first of these, Vacuum Metallurgy, was formed in 1961, which became Advanced Surface Engineering in 1999 when an existing organization affiliated with the Society. The remaining Divisions developed largely from within the Society; listed in order of formation, they are: Thin Films (1964); Surface Science (1968); Vacuum Technology (1970); Electronic Materials and Processing (1979); Fusion Technology (1980), which became Plasma Science and Technology in 1986; Applied Surface Science (1985); Nanometer-Scale Science and Technology (1992); Magnetic Interfaces and Nanostructures (1999); Biomaterial Interfaces (2003). Technical Groups, which focus on newly emerging, dynamic growth areas of science and technology, were established in 1994, and include Manufacturing Science and Technology (MSTG) (1994), The Science of MicroElectroMechanical Systems (MEMS) (1999), and Technology for Sustainability Technical Group (TSTG) (2003).

Organization and Arrangement of Collection

The collection is organized into six subgroups:

• Subgroup 1: Board of Directors records
• Subgroup 2: Publications
• Subgroup 3: Committee records
• Subgroup 4: Division and Technical Group records
• Subgroup 5: Chapter and Region records
• Subgroup 6: National Office records

This collection was formed by combining several accessions from the American Vacuum Society. These accessions were arranged thematically by a member of the American Vacuum Society prior to their transfer to the Niels Bohr Library and Archives. After reviewing the organization of the records as received, the processing archivist made the decision not to treat it as the original order of the records. The current arrangement reflects the organizational structure of the American Vacuum Society.

The bulk of the collection is arranged chronologically, with a few exceptions arranged alphabetically. Notable examples of these exceptions include the Committee records (Subgroup 3), the Division and Technical Group records (Subgroup 4), and the Chapter and Region records (Subgroup 5). Within each of these subgroups, records are arranged alphabetically by the name of the subordinate body.

Processing Information

This collection was formed through the combination of several individual accessions. The processing of the combined collection was completed by Mark A. Matienzo in May 2008.

Information on Accrual of Records

Further accruals are expected.

Provenance and Acquisition Information

Transferred to the Niels Bohr Library and Archives by the American Vacuum Society in several accessions: 1998 (AR 421), 1999 (AR 13), 2000 (AR 64), 2001 (AR 486), 2002 (AR 540), 2007 (AR 760), 2008 (AR 816), and through accrual (AR 334).

Preferred Citation of Collection

Cite as: Item and date, Box [number], Folder [number], American Vacuum Society records, 1953-2007, Niels Bohr Library and Archives, American Institute of Physics, College Park, MD.

Access to Collection

Permission of an officer of depositing organization required for access to records less than 25 years old.

Restrictions on Use of Collection

Use of primary source material in the Niels Bohr Library requires prior approval through an Application for Access, which includes a statement of research purpose and the names and addresses of two scholars as references. Access applications can be obtained by contacting the Library (telephone 301-209-3177; or e-mail nbl@aip.org). The application can also be printed from our website.

Materials Separated from Collection

A large amount of monographic material was received in various accessions and is now held in the book collection of the Niels Bohr Library. These include materials in the AVS Monograph Series and several books on the history of AVS and vacuum science and technology.

All photographs and negatives in the collection have been separated to the Emilio Segrè Visual Archives Collection.

Other Related Materials

Niels Bohr Library and Archives:

• Monograph materials published by the American Vacuum Society
• American Institute of Physics. Office of the Director. Records of H. William Koch, 1932-1988.
• American Institute of Physics. Office of the Director. Records of H. William Koch, 1960-1987.
• American Institute of Physics. Office of the Director. RRecords of H. William Koch and Kenneth W. Ford, 1966-1992.
• American Institute of Physics. Office of the Secretary. Records, 1932-1994.
• American Institute of Physics. Physics Programs. Lewis Slack papers, 1968-1988.
• American Vacuum Society. AVS video history interviews, 1991-2000.
• American Vacuum Society. International Symposium (48th: 2001: San Francisco, Calif.) Special session on NBS/NIST Centennial [videorecording]
• Oral history interview with Charles B. Duke, 2007 January 23.
• Oral history interview with Jane P. Chang, 2005 November 1.
• Oral history interview with Jack S. Kilby.

Thomas Jefferson National Accelerator Facility:

• American Vacuum Society Historical Book Collection.

University Archives, University of Illinois at Urbana-Champaign:

• John A. Thornton papers, 1943-1991.

Selected Search Terms

These papers have been indexed in the International Catalog of Sources for History of Physics and Allied Sciences (ICOS) using the following terms. Those seeking related materials should search under these terms.

Container List

Subgroup 1: Board of Directors records, 1953-2006
		Minutes, 1953-2006
			Board minutes, 1953-2006
Box 1	Folder 1			Committee on Vacuum Techniques board minutes, 1953-1954
	Folder 2			Committee on Vacuum Techniques and American Vacuum Society board minutes, 1956-1957
	Folder 3			American Vacuum Society board minutes, 1958-1959
	Folder 4			American Vacuum Society board minutes, 1960-1961
	Folder 5			American Vacuum Society board minutes, 1962-1963
	Folder 6			American Vacuum Society board minutes, 1964-1965
	Folder 7			American Vacuum Society board minutes, 1966
	Folder 8			American Vacuum Society board minutes, 1967
	Folder 9			American Vacuum Society board minutes, 1968
	Folder 10			American Vacuum Society board minutes, 1969
	Folder 11			American Vacuum Society board minutes, 1970
	Folder 12			American Vacuum Society board minutes, 1971
	Folder 13			American Vacuum Society board minutes, 1972
	Folder 14			American Vacuum Society board minutes, 1973
	Folder 15			American Vacuum Society board minutes, 1974
	Folder 16			American Vacuum Society board minutes, 1975
	Folder 17			American Vacuum Society board minutes, 1976
	Folder 18			American Vacuum Society board minutes, 1977
	Folder 19			American Vacuum Society board minutes, 1978
	Folder 20			American Vacuum Society board minutes, 1979
	Folder 21			American Vacuum Society board minutes, 1980
	Folder 22			American Vacuum Society board minutes, 1981
	Folder 23			American Vacuum Society board minutes, 1982
	Folder 24			American Vacuum Society board minutes, 1983
	Folder 25			American Vacuum Society board minutes, 1984
	Folder 26			American Vacuum Society board minutes, 1985
	Folder 27			American Vacuum Society board minutes, 1986
	Folder 28			American Vacuum Society board minutes, 1987
	Folder 29			American Vacuum Society board minutes, 1988
	Folder 30			American Vacuum Society board minutes, 1989
	Folder 31			American Vacuum Society board minutes, 1990
	Folder 32			American Vacuum Society board minutes, 1991
	Folder 33			American Vacuum Society board minutes, 1992
	Folder 34			American Vacuum Society board minutes, 1993
	Folder 35			American Vacuum Society board minutes, 1994
	Folder 36			American Vacuum Society board minutes, 1995
	Folder 36			American Vacuum Society board minutes, 1995
	Folder 37			American Vacuum Society board minutes, 1996
	Folder 38			American Vacuum Society board minutes, 1997
	Folder 39			American Vacuum Society board minutes, 1998
	Folder 40			American Vacuum Society board minutes, 1999
	Folder 41			American Vacuum Society board minutes, 2000
	Folder 42			American Vacuum Society board minutes, 2001
	Folder 43			American Vacuum Society board minutes, 2002
	Folder 44			American Vacuum Society board minutes, 2003
	Folder 45			American Vacuum Society board minutes, 2004
	Folder 46			American Vacuum Society board minutes, 2005
Box 2	Folder 1			American Vacuum Society board minutes, 2006
			Annual business meeting minutes, 1956-2005
Box 2	Folder 2			Committee on Vacuum Techniques business meeting minutes, 1956-1957
	Folder 3			American Vacuum Society business meeting minutes, 1958-1965
	Folder 4			American Vacuum Society business meeting minutes, 1966-1970
	Folder 5			American Vacuum Society business meeting minutes, 1971-1976
	Folder 6			American Vacuum Society business meeting minutes, 1978-1985
	Folder 7			American Vacuum Society business meeting minutes, 1986-1990
	Folder 8			American Vacuum Society business meeting minutes, 1991-1995
	Folder 9			American Vacuum Society business meeting minutes, 1996-2000
	Folder 10			American Vacuum Society business meeting minutes, 2001-2005
			Executive session minutes, 1981-2006
Box 2	Folder 11			Executive session minutes, 1981-1987
	Folder 12			Executive session minutes, 1988-1989
	Folder 13			Executive session minutes, 1990-1991
	Folder 14			Executive session minutes, 1992-1993
	Folder 15			Executive session minutes, 1994-1995
	Folder 16			Executive session minutes, 1996-1997
	Folder 17			Executive session minutes, 1998-1999
	Folder 18			Executive session minutes, 2000-2006
		Rosters, 1953-2006
Box 2	Folder 19		List of Committee on Vacuum Techniques meeting attendees, 1953-1954
	Folder 20		Board and committee rosters, 1957-1964
	Folder 21		Board and committee rosters, 1965-1969
	Folder 22		Board and committee rosters, 1970-1975
	Folder 23		Board and committee rosters, 1976-1980
	Folder 24		Board and committee rosters, 1981-1985
	Folder 25		Board and committee rosters, 1986-1990
	Folder 26		Board and committee rosters, 1991-1995
	Folder 27		Board and committee rosters, 1996-2000
	Folder 28		Board and committee rosters, 2001-2006
		Governance documents, 1954-2002 and undated
Box 2	Folder 29		Articles of incorporation and name change, 1954 and 1958
	Folder 30		Committee on Vacuum Techniques and American Vacuum Society constitution and bylaws, 1958-1968 and undated
	Folder 31		Constitution and bylaws, 1969-2002
		Election records, 1955-2006 and undated
Box 2	Folder 32		Election materials, 1955-1964
	Folder 33		Election materials, 1966-1970
	Folder 34		Election materials, 1971-1975
	Folder 35		Election materials, 1976-1980
	Folder 36		Election records, 1981-1985
	Folder 37		Election materials, 1986-1991
	Folder 38		Election materials, 1992-1995
	Folder 39		Election materials, 1996-2001
	Folder 40		Election materials, 2002-2006
	Folder 41		Tables of election results, undated
		Correspondence and subject files, 1956-2006
Box 2	Folder 42		Resident agent certificates, 1981-2004
	Folder 43		Materials on tax exemption, 1967-1975
	Folder 44		Materials on tax exemption, 1984-1989
	Folder 45		Board of directors manuals, 2000-2001
	Folder 46		Budget procedures, 1972
	Folder 47		Society Services Committee report, 1979
	Folder 48		Fred Dylla letter on proposed guidelines for non-AVS short courses announcements in AVS newsletters, 1986
	Folder 49		Proposal for creation of Executive Director position, 1969-1973
	Folder 50		Memoranda of agreement and related materials between AVS and the American Institute of Physics, 1971-1985
	Folder 51		Proposal to move AVS from AIP to the American Society of Metals, 1970-1971
	Folder 52		Materials on hiring AVS meetings manager, 1981
	Folder 53		John Thornton briefing to Board of Directors, 1982
	Folder 54		Materials on AIP move from New York to Maryland, 1987
	Folder 55		John Singleton (AVS Secretary) correspondence, 1984
	Folder 56		Committee on Vacuum Technique memorandum on sponsor membership, 1956
	Folder 57		Publicity materials and correspondence, 1962-1964
	Folder 58		Correspondence on obituaries, 1998-2003
	Folder 59		Clippings and correspondence concerning the arrest of Alfred Zehe at the 1983 AVS symposium, 1983-1984
	Folder 60		Correspondence with the Chinese Vacuum Society, 1985-1987
	Folder 61		Correspondence with SPIE, 1986
	Folder 64		Correspondence and materials on International Organization For Vacuum Science And Technology and International Union for Vacuum Science, Technique and Applications, 1960-2001
	Folder 62		Correspondence on travel planning for conferences, 1973-1974
	Folder 63		Memorandum of agreement with the Korean Vacuum Society, 1991
		Membership, 1953-2006
Box 2	Folder 65		CVT and AVS membership rosters and directories, 1953-1969
	Folder 66		AVS membership rosters and directories, 1971-1979
	Folder 68		Membership directories, 1993-1995
	Folder 67		Membership directories, 1981-1989
	Folder 69		Membership directories, 1997
	Folder 70		Membership brochures, 1971-2006 and undated
			Membership cards, circa 1965-1990
Box 2	Folder 71			A
Box 3	Folder 1-2			B
	Folder 3			C
	Folder 4			D
	Folder 5			E-F
	Folder 6			G
	Folder 7-8			H
	Folder 9			I-J
	Folder 10			K
	Folder 11			L
	Folder 12-13			M
	Folder 14			N-O
	Folder 15			P-Q
Box 4	Folder 1			R
	Folder 2-3			S
	Folder 4			T-V
	Folder 5			W
	Folder 6			V-Z
Box 16	Folder 54		CD-ROM of membership files from Slack, Inc., 2003
			Scope and Contents
			Contains two CSV text files with membership data.

Subgroup 2: Publications, 1960-2006
Box 4	Folder 7	Newsletters, 1960-1977
	Folder 8	Newsletters, 1978-1982
	Folder 9	Newsletters, 1983-1986
	Folder 10	Newsletters, 1987-1988
	Folder 11	Newsletters, 1989-1990
	Folder 12	Newsletters, 1991-1992
	Folder 13	Newsletters, 1993-1994
	Folder 14	Newsletters, 1995-1996
	Folder 15	Newsletters, 1997-1999
	Folder 16	Newsletters, 2000-2002
	Folder 17	Newsletters, 2003-2005
	Folder 18	Newsletters, 2006
Box 16	Folder 54	CD-ROM of electronic copies of newsletters, 1961-1989
Box 4	Folder 19	Marketing Programs brochures, 2001-2006
	Folder 20	Buyers' Guide brochures, undated
	Folder 21	Prospectus, 2006

Subgroup 3: Committee records
Box 5	Folder 1	Committee liaison lists, 2002-2006
		Awards Committee records, 1985-2006
Box 5	Folder 47		Calls for nominations, 1991-2006
	Folder 48		Awards reception brochures, 1985-2006
	Folder 49		Correspondence on initial funding of John Vossen Memorial Grant Awards, 1996-1998
	Folder 50		Nomination packages, 1996-1997
	Folder 51		Nomination packages, 1998
	Folder 52		Nomination packages, 1999
Box 6	Folder 1		Nomination packages, 2000
	Folder 2		Nomination packages, 2001
	Folder 3		Nomination packages, 2002
	Folder 4		Nomination packages, 2003
	Folder 5		Nomination packages, 2004
	Folder 6		Nomination packages, 2005
	Folder 7		Nomination packages, 2007
		Chapters, Groups and Divisions Committee records, 1969-1988
Box 5	Folder 29		Policy manuals, 1982-1988
	Folder 30		Newsletters, 1984-1988
	Folder 31		Correspondence on reorganization of sections into chapters and regional administration groups, 1969-1970
	Folder 32		Chapter and division membership information, 1969-1979
Box 6	Folder 8	Distinguished Lecturer Committee brochures, 1999-2004
		Education Committee records, 1967-2006
Box 5	Folder 33		Correspondence on creation of AVS calendar, 1973
	Folder 34		Calendar and related production materials, 1991-1992
	Folder 35		Materials on AVS film and video, 1967-1997 and undated
	Folder 36		Science Educators Workshop release forms, 1991-1995
	Folder 37		Science Educators Workshop release forms, 1996-2000
	Folder 38		Science Educators Workshop release forms, 2001-2006
	Folder 39		Permission forms for reproducing graphics in Robert Waits' Thin Film Deposition and Patterning, 1994-1998
	Folder 40		Correspondence, 1967-1980
	Folder 41		Reports, 1975-1993
	Folder 42		Bibliographies, 1974-1987
	Folder 43		Monograph drafts, 1987
	Folder 44		Roster, 2000
	Folder 45		Publication pricelists, 1967-2006
	Folder 46		Contract with Lawrence Livermore National Laboratory on videotaping short courses, 1981
Box 6	Folder 9	Exhibitors and Manufacturers Committee newsletters, 1999-2006
Box 10	Folder 9	Future Symposium Sites Committee correspondence on 1974 Vacuum Show in Anaheim, California, 1969-1970
		History Committee records, 1960-2005
Box 5	Folder 26		Minutes, 1987-2005
	Folder 27		Correspondence on AVS history, 2002 and undated
	Folder 28		Correspondence and materials on the 1996 Thin Film History exhibit, 1960-1997
Box 17			Thin Film History exhibit materials, circa 1996
Box 16	Folder 54		CD-ROMs of AVS history monograph and drafts, circa 2003
		Local Arrangements Committee records, 1961-2004
Box 10	Folder 10		Minutes, 1961
	Folder 11		Records on 1968 Symposium, circa 1968
	Folder 12		Reports, 1968-1988
	Folder 13		Manuals, 2002-2004
		Publications Committee records, 1962-2006
Box 5	Folder 2		Materials on the creation of the Journal of Vacuum Science and Technology (JVST), 1962-2006
	Folder 3		JVST tables of contents, 1965-1966
	Folder 4		Correspondence on amalgamating JVST and Vacuum, 1969-1970
	Folder 5		Correspondence on donating copies of JVST to India, 1972-1975
	Folder 6		Correspondence on complementary symposium registration, 1976 and 1986
	Folder 7		Correspondence on chapter and division dues, 1972 and 1986
	Folder 8		Liability disclaimer opinion for use in AVS publications, 1975
	Folder 9		Publications pricelist, circa 1975
	Folder 10		Correspondence on availability of United States Air Force appropriations to pay publication fees, 1978
	Folder 11		Reports, 1970-1977
	Folder 12		Reports, 1985-1989
	Folder 13		Calls for papers for Biointerfaces, undated
	Folder 14		Correspondence to AVS members about JVST Online, 1997
Box 16	Folder 54		Copies of JVST on CD-ROM, 1993-2001
		Short Course Executive Committee records, 1965-2006
Box 6	Folder 10		Minutes, 1999-2006
	Folder 11		Beavis, Leonard C. Some reflections on my time with the AVS (Len Beavis), undated
	Folder 12		National Short Course Program report, 1997
	Folder 13		Correspondence, 1984-1985
	Folder 14		Policies, 1979-1985
	Folder 15		Report, 1984
	Folder 16		Market research proposal, 1991
	Folder 17		Marketing study, 1999
	Folder 18		Agreement for online courses with SemiZone, 2002
	Folder 19		Completion certificates, 1974-2006
	Folder 20		Programs and brochures, 1968-1985
	Folder 21		Programs and brochures, 1998
	Folder 22		Programs and brochures, 1999
	Folder 23		Programs and brochures, 2000
	Folder 24		Programs and brochures, 2001
	Folder 25		Programs and brochures, 2002
	Folder 26		Programs and brochures, 2003
	Folder 27		Programs and brochures, 2004
	Folder 28		Programs and brochures, 2005
	Folder 29		Programs and brochures, 2006
			Short course notes, 1965-1997
Box 6	Folder 30			Vacuum Technology for Technicians (Yeager), 1965
	Folder 31			Basic Vacuum, 1970
	Folder 32			Vacuum Processes, 1971
	Folder 33			Vacuum System Technology, 1971
	Folder 34			Vacuum Technology, 1971
	Folder 35			Atomic Composition I (Musket), 1972
	Folder 36			Evaporation Techniques (Bunshah), 1972
	Folder 37			Fundamentals of Sputtering Technology (Mattox), 1972
	Folder 38			Partial Pressure Analyzers and Analysis (Beavis), 1972
	Folder 39			Fundamentals of Sputtering Technology (Mattox), 1974
	Folder 40			Microcircuit Thin Film Technology (Waits, Skok, and Wilson), 1974
	Folder 41-42			Vacuum Technology, 1974
	Folder 43			Optical Coating Technology (Baumeister), 1975
	Folder 44			Vacuum System Design (Patton), 1975
	Folder 45			Freeze Drying (Patton), 1976
	Folder 46			Techniques and Applications of Thin Films for Semiconductor Devices (Wilson), 1976
	Folder 47			Coating Deposition by Sputtering (Thornton), 1979
	Folder 48			Ion Beam Applications to Thin Films (Cuomo, Kaufman and Harper), 1979
	Folder 49			Sputtering (Westwood), 1979
Box 7	Folder 1			Sputter Deposition and Ion Beam Processes (Thornton), 1980
	Folder 2			Sputter-Ion and Titanium Sublimation Pumping (Welch), 1981
	Folder 3			System Design (Patton), 1981
	Folder 4			Systems Design Concepts (Patton), 1984
	Folder 5			Pressure Measurements (Beavis), 1984
	Folder 6			Systems Design Concepts (Patton), 1986
	Folder 7-8			Vacuum Leak Detection (Patton), 1986
	Folder 9			Vacuum Technology Fundamentals (Patton), 1986
	Folder 10			Vacuum Technology Fundamentals exercises, 1986
	Folder 11			Structure-Property Relations in Thin Films (Vook), 1991
	Folder 12			Sputter Deposition (Westwood), 1996
	Folder 13			Operation and Maintenance of Vacuum Pumping Systems (Holloway), 1997 March
	Folder 14			Sputter Deposition (Westwood), 1997 March
	Folder 15			Statistical Process Control in the Modern Wafer Fab (Waits, Yarling), 1997 March
	Folder 16			Basics of Radio Frequency Technology (West), 1997 March
	Folder 17			Chemical Mechanical Planarization (Givens), 1997 March
	Folder 18			Chemical Vapor deposition for Microelectronics (Rogers), 1997 March
	Folder 19			Controlling Contamination in Vacuum Systems (Patton), 1997 March
	Folder 20			Diagnostics for Plasma Techniques (Ghanbari), 1997 March
	Folder 21			High Density Plasma Processing of Electronic Materials (Oehrlein), 1997 March
	Folder 22			Introduction to Contamination Control in Semiconductor Manufacturing Equipment (Johnson), 1997 March
	Folder 23			Magnetic Force Microscopy (Babcock), 1997 March
	Folder 24			Magnetic Thin Films (Marinero, Gurney), 1997 March
	Folder 25			Plasma Etching and RIE (Coburn), 1997 March
Box 8	Folder 1			Sputter Deposition (Westwood), 1997 March
	Folder 2			Basics of Radio Frequency Technology (West), 1997 May
	Folder 3			Introduction to Contamination Control in Semiconductor Manufacturing Equipment (Johnson), 1997 May
	Folder 4			Overview of Applied Vacuum technology (Benapfl), 1997 May
	Folder 5			Plasma Etching and RIE (Coburn), 1997 May
	Folder 6			Surface Preparation for Thin Film Deposition (McGuire), 1997 May
	Folder 7			Basics of Radio Frequency Technology (Barber), 1997 June
	Folder 8			Chemical Vapor deposition for Microelectronics (Rogers) , 1997 June
	Folder 9			Fundamentals of Vacuum Technology (Patton, Singleton), 1997 June
	Folder 10			High Density Processing of Electronic Materials (Oehrlein), 1997 June
	Folder 11			Mass Flow Controllers (Hinkle), 1997 June
	Folder 12			Materials and Surface Characterization and Analysis (Brundle), 1997 June
	Folder 13			Operation and Maintenance of Vacuum Pumping Systems (Singleton), 1997 June
	Folder 14			Plasma Enhanced Chemical Vapor Deposition (Jansen), 1997 June
	Folder 15			Plasma Etching and RIE (Coburn), 1997 June
	Folder 16			Surface Preparation for Thin Film Deposition (McGuire), 1997 June
	Folder 17			Throughput Pump Technology (Hablanian), 1997 June
	Folder 18			Vacuum Leak Detection (Schubert), 1997 June
	Folder 19			Vacuum System Design (Patton), 1997 June
	Folder 20			Application of Residual Gas Analysis in Semiconductor Processes (Waits), 1997 October
	Folder 21			Auger Electron Spectroscopy (Grant), 1997 October
	Folder 22			Basics of Radio Frequency Technology (West), 1997 October
	Folder 23			Chemical/Mechanical Planarization for Microelectronics manufacturing (Givens), 1997 October
	Folder 24			Chemical Vapor Deposition for Microelectronics (Rogers), 1997 October
	Folder 25			Controlling Contamination in Vacuum Systems (Patton), 1997 October
Box 9	Folder 1			Depth Profiling (Grant), 1997 October
	Folder 2			Diagnostics for Plasma Technologies (Ghanbari), 1997 October
	Folder 3			Ellipsometry (Tompkins), 1997 October
	Folder 4			Fundamentals of Semiconductor Characterization (Ahrenkiel), 1997 October
	Folder 5			Fundamentals of Surface Science (Czanderna), 1997 October
	Folder 6			Fundamentals of Vacuum Technology, (Outlaw, Singleton and Tompkins), 1997 October
	Folder 7			Gas Flow in Vacuum Systems (Boeckmann), 1997 October
	Folder 8			Growth and Characterization of Magnetic Thin Films for the Storage Industry (Marinero, Gurney), 1997 October
	Folder 9			Hard Coatings by PVD Methods (Sproul, Matthews), 1997 October
	Folder 10			IC Microdevice Fabrication (Hoff, Gilbert), 1997 October
	Folder 11			Introduction to Ion Sources (Ghanbari), 1997 October
	Folder 12			Mass Flow Controllers (Hinkle), 1997 October
	Folder 13			Materials and Surface Micro-Characterization and Analysis (Brundle), 1997 October