John Woollam's career in ellipsometry
A pioneering physicist builds a business measuring optical properties
by Jennifer Ouellette
pdf version of this article
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John Woollam, standing
in front of a display of patent certificates at the J. A. Woollam
Co. headquarters in Lincoln, Nebraska, examines a silicon wafer,
which can be measured with spectroscopic ellipsometry to reveal
overcoat film thickness and composition.
(Photography by Ben Weddle
and Associates) |
Once, the academic researcher-turned-businessman was a rarity.
Today, physics entrepreneurs start their own companies at the drop
of an investment dollar, spinning university research into commercially
viable products and applications. One of the first but little heralded
pioneers to do so was John Woollam, a physics and electrical engineering
professor at the University of Nebraska–Lincoln (UNL), who
turned his expertise in ellipsometry into a viable commercial business.
Founded in Lincoln in 1987, J.
A. Woollam Co., Inc., has grown into
a worldwide leader in spectroscopic ellipsometry. It holds more
than 40 patents and employs 35-plus people, more than half of whom
have engineering or science degrees.
Woollam came by his interest in science, business,
and engineering naturally, thanks to the influence
of his father, who owned a company in Kalamazoo,
Michigan, selling water pumps. Arthur
Woollam left school after the 9th grade to support
his mother following his own father’s death, but he
became a registered engineer through correspondence
courses. He routinely took his son to the job
with him, demonstrating the principles of how
water pumps worked and the use of water in manufacturing.
The younger Woollam spent hours building
creations in his father’s shop. Nonetheless, he
admits, he was less than a stellar student in junior
high, mostly because school did not interest him.
That attitude had changed by his sophomore year
of high school, after a history teacher convinced him
that although grades are not everything, they do provide
a benchmark for achievement. That same year,
Woollam joined the high
school swim team, which
forced him to learn to budget
his time effectively, a skill that
has served him well throughout
his career. Another strong
influence was his high school
physics teacher, Roy Mesic,
who ran a rigorous class and
encouraged the teenager to
tackle problem solving on his
own if he wanted to succeed
in physics. “You learn enormously
by solving physics
problems, because you are
applying mathematics to what
happens in the real world,” says Woollam, who encourages
his own students to do the same. “I don’t just get
up
and lecture; I make sure they work problems so they can
use their minds.”
Electromagnetics and optics captured Woollam’s interest
early on and formed the basis of his high school
physics project. “I have always been fascinated by the
sheer elegance of Maxwell’s equations, their symmetry,
and the beauty of the solutions,” he says. So at Kenyon
College (Gambier, Ohio), he opted to major in physics
instead of electrical engineering, encouraged by his advisor,
Franklin Miller, Jr., author of the widely used textbook College
Physics. For graduate school, Woollam attended Michigan State University
(MSU). He earned a master’s in
physics in 1963, but he flunked the Ph.D. qualifying examination
the first time he took it. Undaunted, he went back
to his high school solution: problem solving. “My reaction
to a lack of success is to fight back even harder,” he says.
“
So I took every problem on every exam for the previous
10 years and solved every one of them during the next
year.” This time, he passed the test—topping his class— and
earned his Ph.D. from MSU in 1967.
Career start
After graduate school, Woollam worked in
cryophysics and superconductivity for 13 years as
an employee of the National Aeronautics and Space
Administration (NASA), where his assignments
included developing advanced power and propulsion
systems, among other projects. In his spare
time, he earned a master’s degree in electrical engineering
from the Case Institute of Technology at
Case Western Reserve University (Cleveland, Ohio)
in 1978 to supplement his physics background.
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| Outside company headquarters
are engineers and physicists (left to right) Thomas Tiwald,
Jeff Hale, John Woollam, Martin Liphardt, and Ping He. |
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When NASA began scaling back its investment in superconductivity
research, Woollam became interested in exploring other employment.
Instead of accepting a position offered to him at Wright-Patterson
Air Force Base, he moved to UNL—then as now, one of the country’s
leading centers of ellipsometry. When he was asked by the dean to
take over the ellipsometry program, Woollam agreed. “I was
still doing cryophysics at the time, toting liquid nitrogen and
helium across campus in the middle of a Nebraska winter, so I welcomed
the change,” he jokes.
Ellipsometry is not a new technique, having
been around since the early 20th century. But not
until the computer advances that began in the late
1970s did it become useful for both basic and
applied research. “There is a tremendous amount
of calculation involved because the physical quantity
that scientists are interested in is not contained
in the raw data that the instrument creates,” says
Ping He, one of Woollam’s former students and an
employee of J. A. Woollam Co. since 1993. “Those
quantities must be calculated based on physics first
principles, which is nearly impossible without a
computer.” Ellipsometers measure the elliptical
states of polarized light reflected from or transmitted
through a material surface. By studying interfaceinduced
changes—specifically, the phase differences in
the interaction between the material and polarized
light—one can measure fundamental optical properties
of physical systems, including the refractive index,
absorption coefficient, surface roughness, alloy concentrations,
and thickness.
Woollam used ellipsometry at UNL to study new
semiconductor materials for high-frequency electronic
devices, such as gallium arsenide and aluminum gallium
arsenide. However, he became frustrated by the time it
took to acquire data using the ellipsometers and creaky
computers of the time: roughly 20 minutes for a single
wavelength and several hours or a day for a full spectrum. “
I was interested in using ellipsometry in materials
and surface science, so I needed the answers much
faster,” he says. “So we decided to automate the process.”
The innovative instrument proved so much faster at collecting
data on material properties that Samuel Alterovitz,
a former NASA colleague who had worked in Woollam’s
lab for a year as a visiting scientist, wanted to have a similar
capability. The company won a competitive bidding
process, and an improved version of the instrument was
completed in 1988.
Alterovitz’s enthusiasm for the new instrument encouraged
Woollam to set up a fledgling enterprise through contracts from
the Small Business Innovation Research program of the Defense Advanced
Research Projects Agency, while NASA grants continued to partly
fund Woollam’s UNL research. It was a daring step for the
time. “For a university professor to start his own company
in the mid-1980s was not a common thing,” says Alterovitz,
although 10 years later the practice would be almost commonplace.
“This was 5 to 10 years before the advent of the Internet,
when the fastest personal computer available was a 286 processor.
But John has always been an independent person, and he didn’t
want to just sell his ideas to a big company.”
Woollam hired two students who had recently graduated
to develop a commercial prototype of the instrument,
completing a second ellipsometer for the Army Research
Laboratory–Watertown (MA) in June 1989. By then, the
instrument’s data-gathering and processing speeds had
improved so much that Woollam felt confident exhibiting
his instruments at trade shows, where he signed up his
first commercial customers. “Those instruments were a
significant advance in the technology,
and they made us globally competitive
in the ellipsometer market,”
says Woollam. The early sales
helped get the company off the
ground, although Woollam had to
dip into his personal finances to
keep the firm financially sound in
those early years.
Business success
Since then, J. A. Woollam Co. has flourished, largely because
of its diversified market, in which the fiscal ups and downs of
several cyclical industries tend to balance each other out. For
example, the telecommunications industry— particularly manufacturers
of WDM (wavelength division multiplexing) filters—needs ellipsometers.
Other application areas include solidstate lasers, light-emitting
diodes, and optical detectors based on compound semiconductor materials,
as well as organic light-emitting diodes (OLEDs). Many involved
in the widespread efforts to develop OLEDs envision them one day
replacing incandescent lightbulbs as low-cost light sources.
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Woollam watches while James Hilfiker loads
a sample into a spectroscopic ellipsometer that covers the vacuum
ultraviolet to the near infrared. |
The semiconductor industry is another major application area for
ellipsometry because of the large number of thin-film processes
it employs. For example, applied in situ, spectroscopic ellipsometry
could potentially lead to large cost savings in the semiconductor
industry by controlling thin-film properties in silicon integrated
circuits at an earlier stage in the manufacturing process. Current
procedures locate problems when it is too late to take corrective
action. The semiconductor industry also uses ellipsometers to develop
new photoresists for lithography, for use in building thin-film
devices for the next generation of silicon integrated circuits.
The coatings industry often uses coatings with a low-refractive-index
material combined with a high-refractive- index material to make
optical filters or reflectors. On the horizon are so-called active
optical coatings based on electrochromic materials, which change
color when a voltage is applied, as well as Cermet coatings, which
are made using nanoparticles embedded in dielectric materials to
build systems that convert solar energy into an efficient heat source
for space missions.
How it works
Spectroscopic ellipsometry uses
the change in polarization of light incident at an oblique
angle to a sample surface to determine nanoscale information
about the material. The polarization of the input light
is known, and analysis of the polarization of a transmitted
or reflected beam can be used to yield properties of
the material, including index of refraction, extinction
coefficient, thickness, roughness, void fraction, uniformity,
and anisotropy. The mathematical analysis is based on
the “ellipse of polarization,” which uses
the p-s coordinate system, and this gives
ellipsometry its name. The technique is used on
bulk materials, liquids, surfaces of solids, and multilayered
thin films. Information learned is greatly enhanced
by using wavelengths over a wide spectral range, from
vacuum ultraviolet to mid-infrared, and two or more
angles of incidence of the light beam to the surface.
The technique does not require standard materials for
calibration, because light intensity ratios are measured
rather than absolute intensity. Ellipsometry is useful
in any ambient medium through which light can travel,
including air, vacuum, inert gases, water, and oils.
Spectroscopic ellipsometers are used ex situ in an open
laboratory environment and in situ, for example, on
vacuum- or gas-reaction process chambers. See also "Automated
Spectroscopic Ellipsometry", The
Industrial Physicist, March 1996, pp. 30–34.
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Woollam still maintains an active
research program at UNL, which frequently feeds back into his company,
and vice versa. Recently, he has turned to studying biomaterials
interfaces,
especially protein attachment to different types of
surfaces. Using spectroscopic ellipsometry, he studies
and characterizes molecular layers as thin as a single
molecule with dimensional scales of a few nanometers. “
It is one of the greatest technical challenges I have ever
encountered,” says Woollam. “I had grown accustomed
to working with inorganic materials, but even ones as
complex as titanium dioxide are simple compared to
most biomaterials.”
Among the basic problems he is studying at UNL is
how proteins attach to the surface of common implant
materials, such as those used in heart valves and stents,
which are meshed tubes used to keep arteries open. In
this research, his group is testing a prototype instrument
developed by his company for infrared (IR) ellipsometry.
A protein’s IR signature can indicate which molecules are
present, a capability with potential applications in medical
biosensing and possible new markets for the company’s
ellipsometers in biology, biochemistry, and medicine.
“We are constantly working to improve our
instruments and discover new markets and applications,”
says Woollam. “You want to stay ahead of your
competitors, not get stuck trying to catch up.”
Committed teacher
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| Students Leon Castro (left)
and Li Yan load a biological sample into an infrared spectroscopic
ellipsometer for Woollam’s class in optical properties
of materials at the department of electrical engineering at
the University of Nebraska– Lincoln. |
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As if juggling his company and conducting academic research were
not enough, Woollam remains deeply committed to teaching, which
he views as having a synergistic relationship with his industrial
career. He tailors many of his courses to mesh with industrial applications,
such as a class on magnetism in which he covers its applications
in magnetic memories in addition to the fundamental physics. This
approach helps students understand current issues in high-tech industries
and helps Woollam understand the needs of future customers. And
as an advisor, he can steer students into particularly promising
career areas. “Large numbers of physics students go into industrial
jobs these days, so knowing about physics in industry is vitally
important,” he says.
Teaching also gives him a constant source of fresh talent for J.
A. Woollam Co. All of the scientists he employs are former students
less than age 40 who, like Ping He, opted to remain in Lincoln to
work with their former professor. “ John will let his students
try their own ideas,” rather than dictating what they do,
says Ping He. Woollam has adopted the same approach with his employees,
which is part of what attracts former students to his company.
Woollam Co.’s employees have made a favorable impression
over the years on Harland Tompkins, among others. Tompkins, a world-renowned
expert on ellipsometry and the author of two books on the topic,
worked for several years with Woollam’s instruments while
employed by Motorola. As with many other company customers, his
feedback and suggestions over the years have helped improve the
company’s products. “They listen to all their customers.
I firmly believe their equipment is the finest in the world, and
that is part of the reason why,” says Tompkins. Since his
retirement, he has continued to advise the company as a technical
consultant.
Even those students who do not end up working for Woollam’s
company find their lives imprinted by his influence. Hass Machlab
earned his master’s degree under Woollam, working on photothermal
deflection spectroscopy, and stayed for another two years as a research
associate before joining Rockwell. Like Woollam, Machlab has an
entrepreneurial bent and left Rockwell to start his own company,
Innovative Software Engineering (Iowa City, IA), which provides
software-development and consulting services. Although he maintains
that entrepreneurs are born, not made, Machlab nonetheless credits
Woollam with being a valuable role model. “He is an incredibly
driven and positive person, an excellent teacher, yet he runs his
own company as well as a Center for Microelectronic and Optical
Materials Research, without sacrificing quality [in any arena],”
says Machlab, who learned a great deal about the business environment
from watching his former mentor. “Even now, with my own company,
I still find myself doing things the way John does them.”
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