Acton Research has optimized its deep-ultraviolet
(DUV) broadband Al +
MgF2 optical coating for increased
reflectance at 193 nm. The #1900 coating
operates throughout the ultraviolet and visible
spectrum and provides ≥88% reflectance
at 193 nm. The coating’s high
performance provides significant benefit to
manufacturers of semiconductor metrology
equipment, as well as to users of other
applications such as ellipsometry and thinfilm
measurement systems. The #1900
provides higher throughput because of its
10% improvement in spectral reflectance in
the DUV, compared with a conventional
broadband optical coating. The coating
also can be applied to a variety of glass
substrates available from Acton, or on
materials that are supplied by customers,
in prototype and original-equipment manufacturer
quantities.
Acton Research Corp.
15 Discovery Way
Acton, MA 01720
Fiberscope
Krell designed its new SpecVision ILS
video-inspection fiberscope with ultralong
working-distance optics for applications
that require demanding visual inspection,
such as fiber-optic connectors and components.
The handheld ILS uses interchangeable
adapters to view connectors on bulkheads
and polished fixtures, and its flexible
interface platform permits the analysis of
cable assemblies, optical bundles, multifiber
components, and medical specimens.
Users can display high-resolution images
on a computer monitor, and software is
available to facilitate the archiving of data.
Krell Technologies, Inc.
1126 Campus Drive West
Morganville, NJ 07751
Vacuum Generators
Anver’s redesigned line of air-powered,
single-stage vacuum generators provides an
answer for companies seeking such devices
for use on an intermittent basis. The company’s
low-cost, versatile JB series of vacuum
generators have no internal moving parts and
can achieve vacuum levels to 27 in. Hg.
Their straight-through internal design reduces
clogging, and they can be blown free to clear
them. Users can control the JB series by a
manual or automatic valve on the compressed-
air line. The easily mounted vacuum
generators have black anodized aluminum
bodies and brass internal nozzles, and operate
at 72.5 psi on nonlubricated, 50-µm-filtered
air. JB pumps come in five standard
sizes, from 0.76 to 1.34 in. outer diameter.
Options include mufflers, control valves, four
types of vacuum switches, gauges, suspension
assemblies, and vacuum cups.
Anver Corp.
36 Parmenter Road
Hudson, MA 01749
TOF Detector
Burle has announced its enhanced, highperformance,
40-mm-diameter time-of-flight
detector for mass spectrometer applications,
which features the company’s small-pore
5-µm Extended Dynamic Range microchannel-
plate (MCP) technology and a 12.5-cm2
collection area. The large area of collection
and a 760-ps pulse width enables the new
detector to provide previously unobtainable
levels of mass resolution and dynamic range,
as well as a detection sensitivity 10-fold that
of conventional MCPs. The detector comes
housed in Burle’s Quick-Fit replaceable
MCP cartridge, which includes two Chevron
Long-Life small-pore MCPs and a high-voltage
transmission grid mounted in a rugged
module with an integral 50-W impedancematched
conical anode. The module is available
separately or on a 6-in. Conflat flange.
Burle Electro-Optics, Inc.
Sturbridge Business Park
P.O. Box 1159
Sturbridge, MA 01566
Cross-Section Polisher
JEOL’s new cross-section polisher enables
users to prepare clean, polished, large-area
cross sections of samples suitable for imaging
with its line of scanning electron microscopes
(SEMs). The compact, easy-to-use
SM-09010 allows the observation of multiple-
layer structures, interfaces, composites
of soft and hard materials, polymers, powder
grains, and crystalline structures of soft
metals and ceramics with few artifacts.
When preparing samples up to 11(w)
¥10(d) ¥ 2(h) mm, the polisher preserves
internal structures, voids between interfaces,
adhesions between layers, and precipitates,
and it minimizes surface deformation,
unlike mechanical polishers. The
SM-09010 has applications in SEM imaging,
energy-dispersive spectrometry, wavelength-
dispersive spectrometry, and electron-
backscattered diffraction analysis.
JEOL USA, Inc.
11 Dearborn Road
Peabody, MA 01930
Raman System
Thermo Electron’s new NXR FT-Raman
system is an innovative series of instruments
that combine faster detectors and sampling
automation to yield higher-throughput
screening, primarily for chemists, materials
and forensic scientists, and process developers
in pharmaceutical and polymer production.
The NXR series’ Genie germanium
detectors deliver better speed, signal-tonoise
ratio, and hold time, which allows
high-speed scanning without compromising
data quality. The NXR system also contains a
unique MicroStage FT-Raman microscope
that enables easy macro- and microsampling
from the same stage, and the unit enables
the efficient and accurate performance of
high-end experiments.
Thermo Electron Corp.
81 Wyman Street
Waltham, MA 02454
Etched Metals
Photofabrication Engineering manufactures
a full line of custom photochemically
etched metal components for originalequipment
manufacturers of communications
and telecommunication products.
The company’s capabilities include reel-toreel
etching of many materials, including
stainless steel, and it
can provide custometched
gaskets, electromagnetic-
interference/
radio-frequency
shields, face plates,
and screens. Photofabrication
can etch materials
in thicknesses
from thin foil up to
0.09 in. (2.286 mm),
and it can easily incorporate
intricate patterns,
geometries, and
graphics into the etched part, as well as
apply all types of finishes. Photochemical
etching allows greater tolerance control for
elaborate parts than traditional manufacturing
methods because the phototools do
not wear.
Photofabrication Engineering, Inc.
500 Fortune Boulevard
Milford, MA 01757
Sample Extraction
Ascend has brought to the high-tech
marketplace an innovative technique
designed to enhance transmission-electronmicroscopy
(TEM) sample extraction that
the company calls Extreme Magic. It eliminates
most of the difficult and time-consuming
steps associated with focused-ionbeam-
based (FIB) TEM sample preparation.
Extreme Magic works with Ascend’s Extreme
Access manipulator, and it provides
scientists and engineers in semiconductor
manufacturing and materials
research a faster, more reliable
way to prepare the site-specific,
ultrathin samples (<100 nm)
required for atomic-resolution TEM
analysis. Because it significantly
reduces the time and difficulty of
TEM sample preparation, it provides
increased reliability, throughput,
and lower cost per analysis.
Extreme Magic uses Ascend’s nanoengineered
End Effector to extract relatively
thick, site-specific samples, which the
manipulator can position away from the
bulk sample for final FIB thinning or quickscanning
TEM evaluations.
Ascend Instruments, LLC
P.O. Box 91057
Portland, OR 97291-0057
Adhesive/Sealant
Master Bond’s new two-component
epoxy adhesive/sealant, designated EP34AN,
provides users with a high-performance,
room-temperature-curing compound with a
high bonding strength to many substrates.
EP34AN has a thermal conductivity of
22–24 BTU•in./ft2•h•°F, and the com-
Dec-Jan 04 18/11/04 7:42 pm Page 45
pound retains its physical properties after
long exposure to temperatures in the range
of 400–450 °F. It also has superb dimensional
stability, a low coefficient of expansion,
and superior electrical-insulation properties.
Easily mixed, the compound spreads
smoothly, does not sag or drip even on vertical
surfaces, and requires only contact pressure
to cure, but curing time can be reduced
by the use of heat.
Master Bond, Inc.
154 Hobart Street
Hackensack, NJ 07601
Optical Domes
Meller’s custom-fabricated, abrasion-resistant
sapphire optical domes protect
sensitive guidance systems, sensors, and
other electronics from harsh environments
with a clear cover second only in hardness
to diamond. The domes transmit wavelengths
from the ultraviolet to the infrared,
and they provide up to 85% transmission
uncoated and <0.25% reflection per surface
when treated with an antireflective
coating. The optical domes can be made in
sizes from 0.5 to 6.0 in. outer diameter.
They have a Moh 9 surface hardness, surface
finishes to 20-10 scratch-dig per MILPRF-
13830, and a wall thickness variation
of <25 µm, and their 160° included-angles
extend the viewing angle of electronic
detectors and sensors exposed to fast moving
sand, dirt, and water. Meller also supplies
sapphire windows and lenses.
Meller Optics, Inc.
120 Corliss Street
P.O. Box 6001
Providence, RI 02940
Vacuum Pump
Ebara has introduced its newest line of
vacuum pumps, which are designed to
answer the semiconductor industry’s demand
for energy-saving, easily installed, and morecompact
units that provide consistent pumping
speeds at 50 or 60 Hz. Pumps in its new
ESR series—for energy-saving roots—have a
multistage-lobe design engineered for use in
clean and medium-duty processes such as
scanning electron microscopy, physical vapor
deposition, ashing, ion implantation, and
etching. Pumping speeds range from 46 to
706 ft3/min, and the pumps provide a 60%
reduction in space and power requirements
compared with Ebara’s A series and UERR
model pumps.
Ebara Technologies, Inc.
51 Main Avenue
Sacramento, CA 95838
Doppler Vibrometer
MetroLaser’s new single-beam laser-
Doppler vibrometer provides high-sensitivity
measurements of vibrations across a wide
dynamic-measurement range of any surface.
The VibroMet 500 is optimized for distances
from 1 cm to 5 m, without the need to adjust
a focusing lens or to treat surfaces. This capability
makes MetroLaser’s vibrometer easy to
use and ensures quick and accurate measurements.
The compact, rugged, and fieldtested
VibroMet 500 features point-and-measure
operation and heterodyne detection for
high measurement sensitivity, and it comes
with a 12-month warranty.
MetroLaser, Inc.
2572 White Road
Irvine, CA 92614-6236
Mass Spectrometer
Pfeiffer has introduced HiQuad, its new
quadrupole mass spectrometer (MS) that
comes with proven MS technology, the next
generation of Quadera software, and a builtin
Web server for remote operation. The
instrument provides high measurement
speeds of up to 0.125 ms/amu, and excellent
sensitivity with a dynamic range up to
10 orders of magnitude. The new software
permits users to make each analysis no
more or no less complex
than needed.
HiQuad has applications
in areas such
as surface science,
plasma research,
isotope-ratio MS,
t r a c e - g a s
analysis,
and desorption
studies. It
is available as a
complete system or as
components for those who build their own
spectrometers.
Pfeiffer Vacuum, Inc.
24 Trafalgar Square
Nashua, NH 03063-1988
Acton Research has optimized its deep-ultraviolet
(DUV) broadband Al +
MgF2 optical coating for increased
reflectance at 193 nm. The #1900 coating
operates throughout the ultraviolet and visible
spectrum and provides ≥88% reflectance
at 193 nm. The coating’s high
performance provides significant benefit to
manufacturers of semiconductor metrology
equipment, as well as to users of other
applications such as ellipsometry and thinfilm
measurement systems. The #1900
provides higher throughput because of its
10% improvement in spectral reflectance in
the DUV, compared with a conventional
broadband optical coating. The coating
also can be applied to a variety of glass
substrates available from Acton, or on
materials that are supplied by customers,
in prototype and original-equipment manufacturer
quantities.
Krell designed its new SpecVision ILS
video-inspection fiberscope with ultralong
working-distance optics for applications
that require demanding visual inspection,
such as fiber-optic connectors and components.
The handheld ILS uses interchangeable
adapters to view connectors on bulkheads
and polished fixtures, and its flexible
interface platform permits the analysis of
cable assemblies, optical bundles, multifiber
components, and medical specimens.
Users can display high-resolution images
on a computer monitor, and software is
available to facilitate the archiving of data.
Anver’s redesigned line of air-powered,
single-stage vacuum generators provides an
answer for companies seeking such devices
for use on an intermittent basis. The company’s
low-cost, versatile JB series of vacuum
generators have no internal moving parts and
can achieve vacuum levels to 27 in. Hg.
Their straight-through internal design reduces
clogging, and they can be blown free to clear
them. Users can control the JB series by a
manual or automatic valve on the compressed-
air line. The easily mounted vacuum
generators have black anodized aluminum
bodies and brass internal nozzles, and operate
at 72.5 psi on nonlubricated, 50-µm-filtered
air. JB pumps come in five standard
sizes, from 0.76 to 1.34 in. outer diameter.
Options include mufflers, control valves, four
types of vacuum switches, gauges, suspension
assemblies, and vacuum cups.
Burle has announced its enhanced, highperformance,
40-mm-diameter time-of-flight
detector for mass spectrometer applications,
which features the company’s small-pore
5-µm Extended Dynamic Range microchannel-
plate (MCP) technology and a 12.5-cm2
collection area. The large area of collection
and a 760-ps pulse width enables the new
detector to provide previously unobtainable
levels of mass resolution and dynamic range,
as well as a detection sensitivity 10-fold that
of conventional MCPs. The detector comes
housed in Burle’s Quick-Fit replaceable
MCP cartridge, which includes two Chevron
Long-Life small-pore MCPs and a high-voltage
transmission grid mounted in a rugged
module with an integral 50-W impedancematched
conical anode. The module is available
separately or on a 6-in. Conflat flange.
JEOL’s new cross-section polisher enables
users to prepare clean, polished, large-area
cross sections of samples suitable for imaging
with its line of scanning electron microscopes
(SEMs). The compact, easy-to-use
SM-09010 allows the observation of multiple-
layer structures, interfaces, composites
of soft and hard materials, polymers, powder
grains, and crystalline structures of soft
metals and ceramics with few artifacts.
When preparing samples up to 11(w)
¥10(d) ¥ 2(h) mm, the polisher preserves
internal structures, voids between interfaces,
adhesions between layers, and precipitates,
and it minimizes surface deformation,
unlike mechanical polishers. The
SM-09010 has applications in SEM imaging,
energy-dispersive spectrometry, wavelength-
dispersive spectrometry, and electron-
backscattered diffraction analysis.
Thermo Electron’s new NXR FT-Raman
system is an innovative series of instruments
that combine faster detectors and sampling
automation to yield higher-throughput
screening, primarily for chemists, materials
and forensic scientists, and process developers
in pharmaceutical and polymer production.
The NXR series’ Genie germanium
detectors deliver better speed, signal-tonoise
ratio, and hold time, which allows
high-speed scanning without compromising
data quality. The NXR system also contains a
unique MicroStage FT-Raman microscope
that enables easy macro- and microsampling
from the same stage, and the unit enables
the efficient and accurate performance of
high-end experiments.
Photofabrication Engineering manufactures
a full line of custom photochemically
etched metal components for originalequipment
manufacturers of communications
and telecommunication products.
The company’s capabilities include reel-toreel
etching of many materials, including
stainless steel, and it
can provide custometched
gaskets, electromagnetic-
interference/
radio-frequency
shields, face plates,
and screens. Photofabrication
can etch materials
in thicknesses
from thin foil up to
0.09 in. (2.286 mm),
and it can easily incorporate
intricate patterns,
geometries, and
graphics into the etched part, as well as
apply all types of finishes. Photochemical
etching allows greater tolerance control for
elaborate parts than traditional manufacturing
methods because the phototools do
not wear.
Master Bond’s new two-component
epoxy adhesive/sealant, designated EP34AN,
provides users with a high-performance,
room-temperature-curing compound with a
high bonding strength to many substrates.
EP34AN has a thermal conductivity of
22–24 BTU•in./ft2•h•°F, and the com-
Dec-Jan 04 18/11/04 7:42 pm Page 45
pound retains its physical properties after
long exposure to temperatures in the range
of 400–450 °F. It also has superb dimensional
stability, a low coefficient of expansion,
and superior electrical-insulation properties.
Easily mixed, the compound spreads
smoothly, does not sag or drip even on vertical
surfaces, and requires only contact pressure
to cure, but curing time can be reduced
by the use of heat.
Ebara has introduced its newest line of
vacuum pumps, which are designed to
answer the semiconductor industry’s demand
for energy-saving, easily installed, and morecompact
units that provide consistent pumping
speeds at 50 or 60 Hz. Pumps in its new
ESR series—for energy-saving roots—have a
multistage-lobe design engineered for use in
clean and medium-duty processes such as
scanning electron microscopy, physical vapor
deposition, ashing, ion implantation, and
etching. Pumping speeds range from 46 to
706 ft3/min, and the pumps provide a 60%
reduction in space and power requirements
compared with Ebara’s A series and UERR
model pumps.
Pfeiffer has introduced HiQuad, its new
quadrupole mass spectrometer (MS) that
comes with proven MS technology, the next
generation of Quadera software, and a builtin
Web server for remote operation. The
instrument provides high measurement
speeds of up to 0.125 ms/amu, and excellent
sensitivity with a dynamic range up to
10 orders of magnitude. The new software
permits users to make each analysis no
more or no less complex
than needed.
HiQuad has applications
in areas such
as surface science,
plasma research,
isotope-ratio MS,
t r a c e - g a s
analysis,
and desorption
studies. It
is available as a
complete system or as
components for those who build their own
spectrometers.